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System and method for calibration of a flow device

A technology of flow and equipment, applied in the field of calibration of flow equipment, can solve problems such as inefficiency and time-consuming

Inactive Publication Date: 2007-10-03
ENTEGRIS INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This can be time consuming and inefficient

Method used

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  • System and method for calibration of a flow device
  • System and method for calibration of a flow device
  • System and method for calibration of a flow device

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Embodiment Construction

[0031] Preferred embodiments of the invention are illustrated in the drawings, like reference numerals being used to designate like and corresponding parts of the various figures.

[0032] Flow devices such as flow meters and flow controllers typically include a microprocessor-based controller that processes readings from one or more sensors to determine the flow of fluid through the device. The controller applies a flow curve (typically in the form of an nth order polynomial) to a variable indicative of flow (eg differential pressure, pressure, temperature, etc.) to determine flow. To ensure that the measured flow rate is accurate, the flow curve must account for the process fluid used and the system in which the flow device is installed.

[0033] Prior to the present invention, the manufacturer of the flow device had to utilize a test rig similar to the system in which the flow device was to be installed to generate a flow profile for the intended process fluid, or the custo...

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Abstract

Embodiments of the present invention provide a system (200) and method for rapid calibration of a flow device (30). A flow device can be provided with a calibration flow curve (e.g., represented by an n G01F 25 / 00 G05B 15 / 00 16 25 10 2005 / 8 / 12 101048645 2007 / 10 / 3 000000000 Entegris Inc. United Laverdiere Marc Mcloughlin Robert Niermeyer J. Karl dujuan 11038 The Patent Agency of the Chinese Council for the Promotion of International Trade (CCPIT) No.1 Waidajie, Fuxingmen, Beijing 100086 United 2004 / 8 / 13 60 / 601,424 2007 / 3 / 23 PCT / US2005 / 028741 2005 / 8 / 12 WO2006 / 020870 2006 / 2 / 23 English

Description

[0001] Pursuant to 35 U.S.C 119(e), this application claims the benefit and priority of U.S. Provisional Patent Application No. 60 / 601,424, filed August 13, 2004, by Lavardiere et al., entitled "System and Method for Calibration of Flow Device" rights, the contents of which are hereby incorporated by reference in their entirety. technical field [0002] The present invention relates to the calibration of flow devices, and more particularly to the rapid calibration of mass flow meters and mass flow controllers. Background technique [0003] Flow controllers are used in various industries to control the flow of liquids and gases. One industry that relies heavily on flow controllers is the semiconductor manufacturing industry. This is because the manufacture of semiconductors requires precise control of the gas and liquid dispensed into the flow chamber. Many current flow controllers control flow based on differential pressure. These flow controllers receive a set point from...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F25/00G05B15/00
CPCG01F25/0007G01F1/34G05B13/024G01F25/10G01F25/00
Inventor 马克·拉弗迪尔罗伯特·麦克洛克林卡尔·J.·尼尔迈耶
Owner ENTEGRIS INC
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