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Electrochemical sensor

A sensor and electrochemical technology, applied in scientific instruments, instruments, material analysis through electromagnetic means, etc., can solve problems such as expensive, multi-space, and occupation

Inactive Publication Date: 2012-02-15
METTLER TOLEDO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Devices of this type are technically complex, relatively expensive compared to direct cleaning in processing plants, and they take up more space than simple assemblies
Furthermore, the interchangeable fittings need to be controlled and the chambers as well as the sensors must be cleaned independently in different ways

Method used

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  • Electrochemical sensor
  • Electrochemical sensor
  • Electrochemical sensor

Examples

Experimental program
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Effect test

Embodiment Construction

[0045] To better understand the structure of the ISFET in the sensor, figure 1 The immersion medium part of a prior art sensor is shown in a cross-sectional view. The sensor comprises a substantially cylindrical sensor housing 1, for example made of a polymer or other suitable material such as polyetheretherketone (PEEK) or metal, wherein the sensor housing is immersed in the measuring medium 2 in. The sensor is equipped with a disc-shaped ion-sensitive field-effect transistor 3 which, in this embodiment, has a source terminal 4 and a drain terminal 5 on the rear side remote from the measurement medium 2 and on the side facing the measurement medium 2 On the front side there is a medium-exposed surface area 6 comprising the gate area and in contact with the measurement medium 2 .

[0046] The ISFET 3 is seated in the housing cover 7 between the two seals 8 , 9 , so that the medium-exposed surface 6 is in contact with the medium 2 and the ISFET 3 is simultaneously arranged in...

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Abstract

Electrochemical sensor with an ISFET with an FET base structure, which comprises a source region (25), a drain region (26) and a conducting channel (13) arranged between the source region (25) and the drain region (26); a first layer (21), formed directly on the FET base structure and completely covering it; an ion-sensitive layer (117, 217), formed on the first layer (21); and an ESD protective layer (118, 218), which closes off the ISFET towards the measuring medium while leaving a gate region (119, 219, 319); characterized in that both the first interface between the FET base structure and the first layer (21) and the second interface between the first layer (21) and the ion-sensitive layer (117, 217) as well as the surface of the ion-sensitive layer (117, 217) are formed substantially flat in a planar surface region, the planar surface region (34) extending over an inner surface region (28) which is defined by a projection of the source region (25), the drain region (26) and the conducting channel (13) onto the planar surface region.

Description

technical field [0001] The invention relates to an electrochemical sensor with an ion-sensitive field-effect transistor (ISFET). Background technique [0002] Compared with glass electrodes, electrochemical sensors with ISFETs as sensing elements have high mechanical strength and are hardly crackable. Due to these properties, this type of sensor is advantageous for applications in eg the food industry and the pharmaceutical industry. A particular reason for using such sensors is that, due to regulatory requirements, the use of glass electrodes is not legal or at least dangerous in some industrial areas due to the risk of glass breakage. [0003] Depending on their structure, electrochemical sensors with ion-sensitive field-effect transistors can be used for the detection of various substances and are particularly suitable for pH determination. [0004] Generally, an ISFET comprises a FET base structure (FET, Field Effect Transistor) and different materials deposited in lay...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/414
CPCG01N27/414
Inventor M·贝尔纳斯科尼C·德穆特H·范哈伦J·范德图因
Owner METTLER TOLEDO INC