Automatic shape inspection apparatus

Abstract

The invention provides an automatic appearance inspection device without losing the freedom of the photographic scaling factor and free of the restrain of the converter action caused by the existence of the sensor cable. The automatic appearance inspection device for automatic focusing before inspecting the appearance of the object work pieces (K) includes: a converter (53) keeping a plurality ofobject lens (11) and selecting one object lens used for inspection; a photographic unit (51) for photographing the image obtained by the selected object lens; a displacement sensor advance and retreat unit (13) leading the displacement sensor (12) to advance and retreat between the selected object lens and the object work pieces; a storing unit (81) for storing the object lens on the reference position (PB) of the object work pieces in advance beat for the focusing displacement as the reference position (LB); and an up and down driving unit (6) making the object lens best for focusing displacement along the up and down direction to drive the converter according to the displacement (LS) of the object work pieces measured by the displacement sensor and the reference displacement stored in the storing unit.

Description

Automatic Appearance Inspection Device technical field The invention relates to an automatic appearance inspection device. In particular, it relates to an automatic appearance inspection device configured to automatically focus before imaging the appearance of a workpiece to be inspected. Background technique In the manufacturing process of semiconductors or FPDs (FlatPanelDisplays, flat panel displays), it is necessary to automatically check whether there are defects such as scratches, spots, peeling, and stains on the patterns formed on silicon wafers or glass plates. Such an automatic appearance inspection device for inspection includes, for example, an imaging unit such as a metallographic microscope and a CCD camera, an image processing device, and the like. The magnified image of the pattern obtained by the metallographic microscope is captured by an imaging unit and converted into image data. The image arithmetic processing device judges whether the graphics appea...

AI Technical Summary

Problems solved by technology

In other words, one objective lens 11 that should be present is reduced by one, and the function is naturally deteriorated at the point of reducing the freedom of imaging magnification.

Furthermore, since the cable 136 for taking out the signal from the displacement sensor 12 to the outside in the automatic appearance inspection device 1A moves together with the converter 53A, the rotation of the converter 53A twists the cable, resulting in shortening the life of the cable.

In addition, the converter 53A itself may rotate more than 360° in a certain direction, but it is limited by the existence of the cable of the displacement sensor 12, which limits its range of rotation.

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