Automatic shape inspection apparatus

Abstract

The present invention provides an automatic appearance inspection device that does not lose the freedom of imaging magnification and is not restricted by the existence of the displacement sensor cable on the operation of the converter. The automatic visual inspection device for performing automatic focusing before the imaging of the appearance of the object workpiece (K) for inspection has: a converter (53) for holding a plurality of objective lenses (11) and selecting a certain objective lens for inspection; The imaging unit (51) of the image obtained by the objective lens; the displacement sensor advance and retreat unit (13) that makes the displacement sensor (12) advance and retreat between the selected objective lens and the object workpiece; the reference position (PB) of pre-stored object lens on the object workpiece The storage unit (81) of the most suitable focus displacement on the top as the reference displacement (LB); and according to the displacement (LS) of the target workpiece measured by the displacement sensor and the reference displacement stored in the storage unit, drive the conversion along the up and down direction device, so that the objective lens is the most suitable focus displacement of the up and down direction drive unit (6).

Description

technical field [0001] The invention relates to an automatic appearance inspection device. In particular, it relates to an automatic appearance inspection device configured to automatically focus before imaging the appearance of a workpiece to be inspected. Background technique [0002] In the manufacturing process of semiconductors or FPDs (Flat Panel Displays), it is necessary to automatically check whether there are defects such as scratches, spots, peeling, and stains on patterns formed on silicon wafers or glass plates. Such an automatic appearance inspection device for inspection includes, for example, an imaging unit such as a metallographic microscope and a CCD camera, an image processing device, and the like. The magnified image of the pattern obtained by the metallographic microscope is captured by an imaging unit and converted into image data. The image arithmetic processing device judges whether the graphics appearance is good or not based on the image data. S...

AI Technical Summary

Problems solved by technology

In other words, one objective lens 11 that should be present is reduced by one, and the function is naturally deteriorated at the point of reducing the freedom of imaging magnification.

[0007] Furthermore, since the cable 136 for taking out the signal from the displacement sensor 12 to the outside in the automatic appearance inspection device 1A moves together with the converter 53A, the rotation of the converter 53A twists the cable, resulting in shortening the life of the cable.

In addition, the converter 53A itself may rotate more than 360° in a certain direction, but it is limited by the existence of the cable of the displacement sensor 12, which limits its range of rotation.

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