Coater and method of coating a process solution on a substrate using the same
A coating machine and coating technology, applied in the direction of surface coating liquid device, coating, photoplate making process coating equipment, etc., can solve the problem of increasing time and cost, increasing the time and cost of coating process, and coating Reduce the overall efficiency of the process and other issues, to achieve the effect of time and cost reduction
Active Publication Date: 2008-10-08
SEMES CO LTD
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Problems solved by technology
[0016] Therefore, when the coating unit 20 returns to the cleaning unit 30, the coating process is not performed, thus increasing the time and cost of the coating process.
Especially when the coating process is performed on multiple substrates, the time and cost of the coating process is significantly increased because the coating unit 20 returns to the cleaning unit 30 process, which has to be repeated for each substrate
As a result, since the coating unit 20 returns to the cleaning unit 30, the overall efficiency of the coating process is significantly reduced
Method used
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[0035] Referring now to the accompanying drawings showing embodiments of the invention, the invention will be described in further detail. However, this invention may be embodied in many different forms and should not be construed as limited to only the embodiments set forth herein. Rather, these embodiments are presented so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the illustrations, the size and relative sizes of layers and regions may be exaggerated for clarity.
[0036] It will be understood that when an element or layer is referred to as being "on," "connected" or "coupled" to another element or layer, it can be in direct communication with, connected to, or connected to the other element or layer. To connect or couple, or to have elements or layers residing therein. In contrast, when an element is referred to as being "directly on," "directly connected to" or "directly coupled to...
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In a slit coater and method for coating a substrate using the same, the first coating process is prepared on the first cleaning component, and having the first substrate on a supporting unit. The coating unit with a coating solution is stored from the first cleaning component moving along the first direction, coating the first substrate by the coating solution. The second substrate displaces the first substrate during preparing the second coating process on the second cleaning component. The coating unit moves from the second cleaning component along the second direction being opposite direction of the first direction, and the second substrate being coated by the coating solution. Therefore time and cost can be saved during the coating process, thereby the combined efficiency of the coating process can be improved.
Description
[0001] Cross References to Related Applications [0002] This application claims priority under 35 U.S.C. §119 to Korean Patent Application No. 2007-33035 filed with the Korean Intellectual Property Office (KIPO) on April 4, 2007, the contents of which are hereby incorporated by reference in their entirety. technical field [0003] Embodiments of the present invention relate to a slit coater and a method for coating a substrate with a coating solution. More specifically, the present invention relates to a slit coating machine that includes a pair of cleaning parts that can be moved back and forth between the cleaning parts. A slit coater that performs a coating process, and a method of coating a substrate with a coating solution using the coater. Background technique [0004] Recently, with the change of the use environment and the emergence of the multimedia environment, the demand for displays for displaying information has shifted from cathode ray tube (CRT) devices to f...
Claims
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IPC IPC(8): G03F7/16
CPCB05C5/02B05D1/26G03F7/16H01L21/027
Inventor 朴光信印义植
Owner SEMES CO LTD