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Flexible electrostatic actuator

一种激励器、静电的技术，应用在微机电激励器结构领域，能够解决影响激励器可靠性和性能等问题

Inactive Publication Date: 2009-07-01
RES TRIANGLE INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] Despite the ingenuity of conventional exciters, there are many issues affecting the reliability and performance of the exciter

Method used

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  • Flexible electrostatic actuator
  • Flexible electrostatic actuator
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Examples

Experimental program
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Embodiment Construction

[0042] Referring now to the drawings, wherein like reference numerals identify like or corresponding parts throughout, various aspects of the invention are described by way of the following exemplary embodiments of the invention.

[0043] The "operating voltage" of the actuator usually refers to the voltage applied to the fixed electrode and the flexible electrode (such as figure 2 The potential between the electrodes 20, 40 in ) to turn off the actuator and is generally defined by the "start pull-down voltage", which refers to the potential applied to start turn-off. More specifically, an initial “pull down” voltage pulls the flexible composite 50 into contact with the fixed composite 130 . After initial contact, a lower voltage can be used to gradually pull the remainder of the flexible composite 50 into contact with the fixed composite 130, closing the actuator, eg, in a zipper-like fashion.

[0044] In one embodiment of the present invention, as figure 2 As shown, by n...

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Abstract

The invention claims an electrostatic actuator, having a base (10) including a first electrode (20), and a flexible membrane (50) including at least two material layers of different materials in contact with each other, wherein at least one of the material layers includes a second electrode (40) electrically isolated from the first electrode; the flexible membrane includes a fixed end where it is connected to the base and a free end opposite the fixed end and separated from the base; the free end of the flexible membrane is configured to move relative to the base under electrostatic force; the electrostatic actuator further includes non-infiltration compound arranged on at least one surface of an upper surface of the flexible membrane, a lower surface of the flexible membrane and an upper surface of the base.

Description

[0001] This application is a divisional application of an invention patent application named "Flexible Electrostatic Actuator" with the filing date of April 25, 2005 and the application number of 200580017738.8. [0002] Cross References to Related Applications [0003] This application is related to and claims priority to U.S. Provisional Application Serial No. 60 / 564,594, entitled "Releasing Structures," filed April 23, 2004, which is hereby incorporated by reference in its entirety . This application is related to and claims priority to U.S. Provisional Application Serial No. 60 / 564,580, entitled "Electrostatic Valve with Non-Wetting Layer," filed April 23, 2004, which The entire content of is hereby incorporated by reference. This application is related to and claims priority to U.S. Provisional Application Serial No. 60 / 564,573, entitled "Flow Control for Higher Operating Pressures," filed April 23, 2004, which The entire content of the provisional application is hereby ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01H59/00B81B7/02
Inventor 戴维·E·道施斯考特·H·古德温
Owner RES TRIANGLE INST