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Panel structure and method of manufacturing the same

A manufacturing method and panel technology, which can be used in semiconductor/solid-state device manufacturing, electrical components, transistors, etc., and can solve problems such as occupying more space and affecting the setting of other electronic components.

Inactive Publication Date: 2010-08-04
WINTEK CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the area occupied by the control circuit increases, the control circuit will occupy more space on the substrate, which will affect the arrangement of other electronic components.

Method used

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  • Panel structure and method of manufacturing the same
  • Panel structure and method of manufacturing the same
  • Panel structure and method of manufacturing the same

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0058] Please also refer to figure 1 and Figure 2A , figure 1 A schematic diagram showing the panel structure according to the first embodiment of the present invention, Figure 2A draw figure 1 Sectional view of the panel structure in . The panel structure 100 includes a substrate 101 , a plurality of first transistors 110 and a plurality of second transistors 150 . To simplify the illustration, the Figure 2A Only one first transistor 110 and one second transistor 150 are shown in FIG.

[0059]The substrate 101 has a display circuit 102 and a control circuit 108 , wherein the control circuit 108 drives the display circuit 102 to display images. The first transistor 110 is disposed on the display circuit 102 of the substrate 101 , and the first transistor 110 has a first active layer 128 . The second transistor 150 is disposed on the control circuit 108 of the substrate 101 , and the second transistor 150 has a second active layer 168 . Wherein, the material of at le...

no. 2 example

[0085] Please refer to Figure 7A , which shows a cross-sectional view of the panel structure according to the second embodiment of the present invention. Figure 7A The second island structure 260 of the panel structure 200 with Figure 2A The second island structure 160 of the panel structure 100 is different. Although the second island structure 260 of the panel structure 200 also has the second electrode layer 262 , the second opening 264 and the second active layer 268 , the second active layer 268 is disposed on the insulating layer 290 . The second electrode layer 262 is disposed above the second active layer 268 , and the second opening 264 penetrates the second electrode layer 262 to expose the second active layer 268 .

[0086] To simplify the illustration, the Figure 7A Only one first transistor 210 and one second transistor 250 are shown in FIG. However, as mentioned above, the panel structure 200 only has the second island structure 260 and the panel structur...

no. 3 example

[0098] Please refer to Figure 10A , which shows a cross-sectional view of the panel structure according to the third embodiment of the present invention. Figure 10A The second transistor 350 of the panel structure 300 with Figure 2A The second transistor 150 of the panel structure 100 is different. Although the second transistor 350 also has a second gate 351 and a second island structure 360 ​​, the second gate 351 is disposed on the insulating layer 390 , and the second island structure 360 ​​is disposed between the insulating layer 390 and the substrate 301 .

[0099] The second island structure 360 ​​also has a second electrode layer 362 , a second opening 364 and a second active layer 368 . The second electrode layer 362 is disposed on the substrate 301 . The second opening 364 penetrates the second electrode layer 362 to expose the substrate 301 . The second active layer 368 covers the second opening 364 .

[0100] In this embodiment, the panel structure 300 incl...

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Abstract

The invention discloses a panel structure and producing method thereof, wherein the panel structure is arranged in a display device, and comprises a base plate, a plurality of first transistors and a plurality of second transistors. The base plate is provided with a display circuit and a control circuit. The first transistors are arranged on the display circuit of the base plate, and these secondtransistors which are provided with second active layers are arranged on the control circuit of the base plate. At least one of the first active layer and the second active layer comprises ZnO. The invention uses ZnO as the material of the transistors equipped on at least one of the display circuit or the control circuit, which can make the transistor have high electron mobility, and the technology of the transistor is compatible with the technology of transistors made by amorphous silicon material.

Description

technical field [0001] The invention relates to a panel structure and its manufacturing method, and in particular to a panel structure with a control circuit and a display circuit on a substrate and its manufacturing method. Background technique [0002] With the development of technology, display panels with control circuits and display circuits on the substrate are gradually becoming popular. Each of the display circuit and the control circuit is driven by a plurality of thin film transistors (hereinafter referred to as TFT). The thin film transistors of the display circuit and the control circuit usually use the same semiconductor material, such as amorphous silicon (a-Si) material or low temperature polysilicon (LTPS) material. [0003] The leakage current of a TFT made of polysilicon material is greater than that of a TFT made of amorphous silicon material. When the display circuit uses TFTs made of polysilicon material, the display circuit must increase the area of ​...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/12H01L29/786H01L29/22H01L21/84H01L21/336
Inventor 王文俊康恒达朱健慈
Owner WINTEK CORP