Method for manufacturing electrostatic repulsion force driven MEMS distorting lens
A technology of electrostatic repulsion and manufacturing method, which is applied in the manufacture of microstructure devices, technology for producing decorative surface effects, decorative art, etc., can solve the problem of large diffraction loss, the limitation of the application range of deformable mirrors, and the inability to make continuous surface MEMS Electrostatic repulsive deformable mirrors and other problems can avoid diffraction loss and improve light reflectivity
Inactive Publication Date: 2011-06-29
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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However, the existing electrostatic repulsion-driven MEMS deformable mirrors are all made of surface technology containing only one layer of silicon nitride. During the manufacturing process, the release of the structural layer is realized through the release holes on the mirror surface. Not only can the continuous surface MEMS electrostatic repulsion deformable mirror be made, but also the filling factor of the mirror surface will be reduced due to the introduction of the release hole, which will cause a large diffraction loss, and finally limit the application range of the deformable mirror.
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[0027] Taking the manufacturing method of a single MEMS deformable mirror driven by electrostatic repulsion as an example, the present invention will be described in detail in conjunction with the accompanying drawings.
[0028] The manufacturing method of the MEMS deformable mirror driven by the electrostatic repulsion force of the present embodiment, its specific steps are as follows:
[0029] (1) Firstly deposit a first layer of silicon nitride 2 with a thickness of 0.6 μm on the silicon substrate 1 as the lower insulating layer, such as figure 1 shown;
[0030] (2) Then, continue to deposit the first layer of polysilicon or amorphous silicon 3 with a thickness of 0.5 μm and carry out dry etching to it, the etching depth is equal to the thickness of the first layer of polysilicon or amorphous silicon 3, forming the deformable mirror lower electrode, such as figure 2 shown;
[0031] (3) Deposit the first layer of silicon dioxide or phosphosilicate glass 4 with a thicknes...
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Abstract
The invention discloses a method for manufacturing an MEMS deformable mirror driven by electrostatic repulsive force, which mainly comprises processes of multilayer film deposition, drying, wet etching and the like on a silicon substrate, and is characterized by introducing a two-layer silicon nitride film and a bottom etching process. The method for manufacturing the MEMS deformable mirror driven by the electrostatic repulsive force not only can eliminate electrostatic pull-in phenomenon and increase optical aberration correcting capability, but also can avoid diffraction loss brought by a mirror surface release hole and improve filling factors and light reflex efficiency of the MEMS deformable mirror surface greatly.
Description
technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, in particular to a method for manufacturing a MEMS deformable mirror driven by an electrostatic repulsion force suitable for an adaptive optical system. Background technique [0002] In the field of deformable mirrors, electrostatically driven MEMS deformable mirrors have the advantages of fast response, low energy consumption, small size, and high cell density, and become a micro-deformable mirror with the most development potential. Due to the electrostatic pull-in phenomenon of traditional electrostatic attraction MEMS deformable mirrors, its stroke will not exceed one-third of the initial gap between the upper and lower electrodes. Driven by electrostatic repulsion, the electrostatic pull-in phenomenon can be eliminated, thereby increasing the stroke of the deformable mirror. However, the existing electrostatic repulsion-driven MEMS deformable mirrors are all mad...
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IPC IPC(8): G02B26/08B81C1/00
Inventor 邱传凯胡放荣姚军
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI