Double-flash evaporation device for preparing superlattice thermoelectric film material

A technology of thermoelectric thin film and flash evaporation method, which is applied in metal material coating process, vacuum evaporation plating, ion implantation plating, etc., can solve the problems of high cost, complicated preparation process, and difficulty of superlattice thermoelectric thin film materials, etc. Achieve the effect of low cost and simple process

Inactive Publication Date: 2010-04-28
JIUJIANG UNIVERSITY
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Problems solved by technology

[0003] (1) The preparation of superlattice thermoelectric thin film materials mainly adopts epitaxial growth technology with high cost or complex process, expensive equip

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  • Double-flash evaporation device for preparing superlattice thermoelectric film material
  • Double-flash evaporation device for preparing superlattice thermoelectric film material

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preparation example Construction

[0014] The preparation of superlattice thermoelectric thin film materials: The first is the synthesis of raw materials, using elemental Bi (99.9%, 200 mesh), Te (99.99%, 200 mesh), Sb (99.99%, 100 mesh) and Se (99.9%, 100 mesh). Mesh) The powder is used as the raw material. The experiment uses a planetary gear ball mill for mechanical alloying of the powder. The ball mill tank and the grinding ball are made of stainless steel. P-type and N-type thermoelectric materials are in accordance with Bi 0.5 Sb 1.5 Te 3 And Bi 2 Te 2.7 Se 0.3 The compound ingredients are mixed, and then the so-called powder is loaded into a ball mill tank for mechanical alloying. In order to prevent oxidation, the powder filling and powder taking are carried out in a glove box filled with argon gas. The ball milling atmosphere is high-purity argon gas. The ball milling process is: the ball-to-material ratio is 15:1, the ball milling speed is 400r / min, and the ball milling time is 10h. Subsequently, the m...

preparation example

[0018]

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Abstract

The invention discloses a double-flash evaporation device for preparing a superlattice thermoelectric film material. The double-flash evaporation device has the structure that a substrate device comprises a speed regulating motor, a substrate bracket, a heater, a substrate, a quartz crystal oscillation thickness monitoring instrument, a baffle plate and a thermocouple, wherein the speed regulating motor is connected with the substrate bracket, the substrate is installed below the substrate bracket, the substrate bracket is positioned in a vacuum cavity body, the speed regulating motor drives the substrate bracket and the substrate to rotate, the heater is used for heating the substrate, and the thermocouple is used for measuring the temperature of the substrate. The invention realizes the preparation of the superlattice thermoelectric film material by combining a flash evaporation method and a two-way alternate powder delivery device and has the advantages of high efficiency, energy saving, low cost, simple process and the like.

Description

Technical field [0001] The invention belongs to the technical field of material preparation devices, and specifically relates to a double flash evaporation method device for preparing superlattice thermoelectric thin film materials. Background technique [0002] The broad application prospects of thermoelectric materials in microelectronics, optoelectronics and many high-tech fields have received widespread attention in recent years. So far, people have conducted in-depth and detailed research on bulk thermoelectric materials, but their thermoelectric properties are still low for large-scale applications. As we all know, low-dimensionality is an effective way to improve the performance of thermoelectric materials. This is mainly because low-dimensional thermoelectric materials have special quantum confinement effects. The quantum size effect of electrons and phonons can greatly improve the thermoelectric properties of the material during transmission. . In recent years, researc...

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Application Information

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IPC IPC(8): C23C14/24C23C14/06
Inventor 段兴凯江跃珍胡孔刚
Owner JIUJIANG UNIVERSITY
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