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Substrate conveyer

A technology for conveying devices and substrates, applied in the direction of conveyor objects, transportation and packaging, furnaces, etc., can solve the problems that substrates cannot be suspended, and it is difficult to use motors in practice

Inactive Publication Date: 2013-10-16
SFA ENG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

So, if the motor has a large power rating to spray the air that suspends the substrate, it will cause many complications
As a result, it is difficult to practically utilize a motor with a large rated power
On the other hand, if the rated power of the motor is not sufficient to suspend the substrate, the substrate cannot be suspended at the desired height

Method used

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  • Substrate conveyer
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Embodiment Construction

[0083] For a fuller understanding of the invention and its advantages, reference is made to the accompanying drawings, which illustrate embodiments of the invention.

[0084] Embodiments of the present invention are explained below with reference to the drawings, and the present invention is described in detail. The same reference numerals in the figures denote the same components.

[0085] figure 1 is a perspective view of a substrate transfer device according to a first exemplary embodiment of the present invention; figure 2 for figure 1 floor plan; image 3 is a partially exploded perspective view of the gripping and transporting unit; Figure 4 is a schematic cross-sectional view of the grasping and conveying unit; Figure 5 and Image 6 for figure 1 , showing the operation of the grasping and conveying units, respectively; Figure 7 (a) to (c) schematic representation figure 1 Operation of the substrate transfer device in .

[0086] As shown in the figure, the ...

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PUM

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Abstract

PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus which reduces the generation of noise and particles, and can be manufactured by using structure which is more efficient than a prior art, and transfers a substrate at a high speed.SOLUTION: The substrate transfer apparatus includes a gripping transfer unit for forcibly transferring a substrate by gripping at least one region of the substrate arranged in parallel to the ground, and an auxiliary transfer unit arranged adjacent to the gripping transfer unit for supporting the substrate so as to be transferable.

Description

[0001] Cross reference to related applications [0002] This application is claimed based on Korean Patent Application No. 10-2008-0116865 filed with the Korean Intellectual Property Office on November 24, 2008 and Korean Patent Application No. 10-2008-0116866 filed on November 24, 2008 No. and Korean Patent Application No. 10-2009-0055859 filed on June 23, 2009, the entire disclosure of which is incorporated herein by reference. technical field [0003] The invention relates to a substrate transfer device, in particular to a substrate transfer device capable of reducing noise and dust particles, which is more advanced than the traditional structure, and capable of transferring substrates at high speed. Background technique [0004] Generally speaking, the substrate includes: flat panel display (flat panel display; FPD) substrate, such as plasma display panel (plasma display panel; PDP), liquid crystal display (liquid crystal display; LCD), organic light emitting diode (orga...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G49/06H01L21/677
Inventor 李京南张宰植朴纯弼
Owner SFA ENG CORP