Apparatus and method for manufacturing an organic light emitting panel
A technology for organic light-emitting panels and manufacturing devices, which is applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., and can solve problems such as air bubbles mixing into component substrates and sealing substrates, and misalignment between component substrates and sealing substrates
Active Publication Date: 2011-03-30
MITSUBISHI HEAVY IND LTD +1
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Problems solved by technology
[0008] However, in the conventional light-emitting panel manufacturing apparatus and light-emitting panel manufacturing method disclosed in the above-mentioned Patent Documents 1 and 2, there is a problem that air bubbles are mixed between the element substrate and the sealing substrate when the element substrate and the sealing substrate are bonded together.
Furthermore, in the conventional light-emitting panel manufacturing apparatuses and light-emitting panel manufacturing methods disclosed in the above-mentioned Patent Documents 1 to 4, there is a problem that misalignment occurs between the element substrate and the sealing substrate when the element substrate and the sealing substrate are bonded together.
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[0057] Hereinafter, modes for implementing the manufacturing apparatus of the organic light emitting panel and the manufacturing method of the organic light emitting panel of the present invention will be described with reference to the drawings.
[0058] First, the structure of the manufacturing apparatus of the organic light emitting panel of this invention is demonstrated.
[0059] figure 1 It is a schematic diagram showing the structure of the manufacturing apparatus of the organic light-emitting panel of the present invention in cross section.
[0060] like figure 1 As shown, the manufacturing apparatus of the organic light-emitting panel of the present invention includes a lower vacuum vessel 1 and an upper vacuum vessel 2 . The upper vacuum container 2 is attached to the lower vacuum container 1 via a hinge 11 so as to be openable and closable. A partition plate 8 that is an elastic body plate is provided at the opening of the upper vacuum vessel 2 .
[0061] Inside...
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The present invention provides an apparatus and method for manufacturing an organic light emitting panel, where air bubbles will not be mixed between an element substrate and a sealing substrate in attaching of the element substrate and the sealing substrate, and there will not be dislocation between the element substrate and the sealing substrate. A lower side vacuum container (1) and an upper side vacuum container (2) are enclosed so as to vacuumize a first space and a second space to make the sealing substrate (3) to rise to contact with the element substrate (4), a gas of an atmosphere pressure or more is guided into the first space, such that a pressure difference between the first space and the second space is applied to the element substrate (4) by a baffle (8), thereby, the element substrate (4) is of crimp connection with the sealing substrate (3).
Description
technical field [0001] The present invention relates to a manufacturing device of an organic light emitting panel and a manufacturing method of the organic light emitting panel. Background technique [0002] Since organic EL (Electro Luminescence) is extremely thin and has a so-called surface-emitting shape, excellent color reproducibility, so-called UV-free (UV ray)-free light quality, and no mercury, it is expected to save energy compared to fluorescent lamps. Environmental performance, etc., Great expectations are given to next-generation lighting that is good for the environment. This organic EL is generally produced by using a glass substrate on which a pattern of a transparent conductive film has been formed, and mainly going through a cleaning process, an organic layer film forming process, a cathode film forming process, and a sealing process. In addition, if the organic layers of the organic EL are exposed to moisture or oxygen in the atmosphere, the luminescent ch...
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IPC IPC(8): H01L51/56
CPCH10K50/84H10K71/00
Inventor 堀惠一大泉光典荐田大介
Owner MITSUBISHI HEAVY IND LTD