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Substrate processing apparatus and display method of substrate processing apparatus

一种基板处理装置、基板处理的技术，应用在不基于冗余的故障处理、电数字数据处理、响应错误的产生等方向，能够解决未显示信息写入状况、USB闪存拆下等问题

Inactive Publication Date: 2011-04-06
ITACHI KOKUSAI ELECTRIC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the function to check the writing status of information (data) is not displayed on the operation screen of the substrate processing equipment.
Therefore, even if it is in the middle of writing information, there is a possibility that the USB flash memory may be removed by mistake due to the same processing as a floppy disk.

Method used

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  • Substrate processing apparatus and display method of substrate processing apparatus
  • Substrate processing apparatus and display method of substrate processing apparatus
  • Substrate processing apparatus and display method of substrate processing apparatus

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Experimental program
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Embodiment Construction

[0028] Hereinafter, the form for implementing this invention is demonstrated based on drawing.

[0029] Figure 1A The substrate processing apparatus 10 is shown using a perspective view in . in addition, Figure 1B The substrate processing apparatus 10 is shown in a side perspective view.

[0030] The substrate processing apparatus 10 processes a wafer 200 made of silicon or the like serving as a substrate.

[0031] like Figure 1A and Figure 1B As shown, in the substrate processing apparatus 10 , a hoop (substrate container, hereinafter referred to as a pod) 110 used as a carrier for accommodating a wafer 200 is used. In addition, the substrate processing apparatus 10 has a substrate processing apparatus main body 111 .

[0032] A front maintenance port 103 is provided at the front front portion of the front wall 111a of the substrate processing apparatus main body 111, and front maintenance doors 104 for opening and closing the front maintenance ports 103 are respectiv...

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PUM

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Abstract

The invention provides a substrate processing apparatus and a display method of the substrate processing apparatus. The substrate processing apparatus is capable of giving notice to a user to prevent an improper removal of a removable storage medium and providing a manipulation screen through which it can be determined whether the removable storage medium can be removed. The substrate processing apparatus comprising: a controller configured to control display of a manipulation screen through which substrate processing information is manipulated; and an attachment / detachment part to which a removable external storage device is attached, wherein when an external storage device is attached to the attachment / detachment part, the controller disposes and enables an external storage device remove button, and when an external storage device is not attached to the attachment / detachment part, the controller disables the button.

Description

technical field [0001] The present invention relates to a substrate processing device for processing substrates such as semiconductor substrates and glass substrates, and a display method for the substrate processing device. Background technique [0002] Conventionally, a floppy disk (registered trademark) or the like has been used as an external storage medium in a substrate processing apparatus such as a semiconductor manufacturing apparatus. However, although floppy disks are convenient for moving data, it is difficult to move large amounts of data. Therefore, it is difficult to perform sufficient data analysis based on the limited amount of data stored in the floppy disk, and it takes a lot of time to move the required amount of data through the floppy disk for sufficient data analysis. [0003] In recent years, a USB (Universal Serial Bus) flash memory has been used as an external storage medium of a substrate processing apparatus, and the capacity of the external stor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F11/00H01L21/00
CPCG06F11/0736G06F11/073G06F11/0766H01L21/00H01L21/02
Inventor 中川良彦
Owner ITACHI KOKUSAI ELECTRIC INC