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Focusing method and device

A focusing method and focusing device technology, applied in the field of optical detection, can solve problems such as poor detection effect, insufficient focus speed, and insufficient focus range

Active Publication Date: 2011-07-13
IND TECH RES INST
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  • Claims
  • Application Information

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Problems solved by technology

However, as the size of the substrate increases, the amount of deflection also increases. Therefore, when the focusing range of the automatic optical inspection (AOI) system (automatic optical inspection, AOI) is not large enough and the speed of focusing is not fast enough, the detection effect is often poor, and the impact to the follow-up process

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Embodiment Construction

[0046] In order to enable the examiner to have a further understanding of the features, purposes and functions of the present invention, the relevant detailed structure and design concept of the device of the present invention will be explained below, so that the examiner can understand the principles of the present invention. Features, detailed statements are as follows:

[0047] The present invention provides a focusing method, which uses the principle of dispersion to project dispersed light onto an object, and uses spectral analysis to find out the wavelength of the maximum energy in the reflected light signal, or the wavelength that can represent the maximum energy concentration after analysis , to obtain the surface height information of the object. Then, according to the surface height information, the segment with low dispersion in the dispersed light is focused on the object to obtain a clear in-focus image. Utilizing the method of the present invention, on the one h...

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Abstract

The invention provides a focusing method and a device, which are used for modulating a broadband light into a dispersed light by a dispersion mirror group having high dispersion and low dispersion characteristics, and transmits the dispersed light on an object to form an object light. With a light filtering procedure and a light splitting procedure, a wave band corresponding to high dispersion in the object light is used for detecting height information of the surface appearance of the object; and the light of a wave band corresponding to the low dispersion in the dispersed light is condensed on the surface of the object according to the height information. By the filtering mode, the light corresponding to the low dispersion wave band in the object light is transmitted to an image sending device so as to obtain a clear focus image about the object surface.

Description

technical field [0001] The present invention relates to an optical detection technology, in particular to a focusing method and device for automatic and real-time focusing using the principle of dispersion. Background technique [0002] As the technology of flat panel display manufacturers continues to improve, the requirements for quality control in the array (array) process, liquid crystal (cell) process, and color filter (color filter) process are becoming more and more stringent. Therefore, the effect of online real-time defect detection will affect the production capacity of products and the cost of manufacturing. [0003] Generally speaking, when the size of the panel is getting bigger and bigger, the speed of the process and inspection must also be accelerated, so as not to affect the speed of production. However, as the size of the substrate increases, the amount of deflection also increases. Therefore, when the focusing range of the automatic optical inspection (AO...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/36
Inventor 陈金亮王俊杰王浩伟郭世炫张乐融赖皇文
Owner IND TECH RES INST