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Non-contact holder and non-contact holding hand

A non-contact and holding technology, which is applied in the direction of workpiece clamping devices, conveyor objects, furnaces, etc., can solve the problems of keeping the distance between the workpiece and the holding surface unchanged, the inability to stabilize the workpiece posture, and the instability of the workpiece posture. Pressure and positive pressure stabilization, postural stability, and effects of suppressing pressure drop

Inactive Publication Date: 2011-08-17
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] When the negative pressure acting on the workpiece fluctuates or the local positive pressure fluctuates as described above, it is difficult to keep the distance between the workpiece and the holding surface constant within the plane of the holding surface, and the posture of the workpiece becomes unstable.
In addition, when multiple non-contact holders are used to hold the workpiece, fluctuations in negative pressure and localized positive pressure are generated at different times for each non-contact holder, so the posture of the workpiece cannot be held stably.

Method used

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  • Non-contact holder and non-contact holding hand

Examples

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Embodiment Construction

[0030] Below, refer to Figure 1 to Figure 3 One embodiment of a non-contact holding handle to which the non-contact holding body of the present invention is applied will be described. figure 1 It is an exploded perspective view of the non-contact holding handle. figure 2 It is a figure which shows the structure of a holding part, (a) is a perspective view seen from the side opposite to a holding surface, (b) is a perspective view seen from the holding surface side. image 3 (a) is a plan view seen from the side of the holding surface of the holding portion, image 3 (b) is a cross-sectional view along line A-A.

[0031] Such as figure 1 As shown, the non-contact holding handle 10 has a housing portion 11 , a holding portion 12 as a cylinder, and a compressed air supply source 13 as an air supply source.

[0032] The case unit 11 is composed of a lower case 14 and an upper case 15 fixed to the lower case 14 . The case part 11 has a frame part 16 on which the holding part...

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Abstract

A non-contact holder holds the workpiece on the holding surface without contact between the workpiece and the holding surface by generating a negative pressure at the opening using a circular flow of gas introduced into the inside of the column body and generating a positive pressure between the holding surface and the workpiece using the gas flowing from the opening provided on the holding surface, and the holding surface has (2n+1) (n: a positive integer) guide grooves which have spiral shapes extending in spiral directions in correspondence with the circulation direction of the circular flow and have starting ends communicating with the opening to guide the gas introduced through the starting ends in the spiral directions, the final ends of the guide grooves being disposed at equal intervals on the circumference of the holding surface around the opening.

Description

technical field [0001] The present invention relates to a non-contact holding body and a non-contact holding handle for holding an object to be held without contact between the object to be held and a holding surface by applying negative pressure and positive pressure to different regions of the object to be held. Background technique [0002] Conventionally, as disclosed in Patent Document 1, there is known a non-contact holder that holds a workpiece such as a liquid crystal substrate or a semiconductor wafer without contacting the holding portion. A non-contact holding body utilizing a gas swirling flow is generally composed of a cylindrical body whose end surface facing the workpiece constitutes a holding surface. Moreover, when the gas swirling flow formed in the cylinder flows out from the opening provided on the holding surface to between the workpiece and the holding surface, a negative pressure formed by the swirling flow is formed at the central part of the opening ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G49/07B65G49/06
CPCB25B11/007
Inventor 原田贤一守屋智德
Owner SEIKO EPSON CORP