Drum-type film coating equipment

Abstract

The invention discloses drum-type film coating equipment, which is used for coating a film on a substrate in atmospheric pressure environment. The film coating equipment comprises a bearing device, a base, a cleaning device, a heating device, a drum device, a liquid spray device and a driving device, wherein an accommodating groove is formed on the bearing device; the base is arranged at the bottom of the accommodating groove, and is used for supporting at least one substrate; the cleaning device and the heating device are arranged in the accommodating groove, and are fixedly arranged on the middle part of the bearing device; the drum device is arranged above the cleaning device and the heating device, and comprises a plurality of drums which are arranged at intervals side by side; the distance between adjacent drums is equal to the thickness of the substrate; the liquid spray device is arranged above the drum device, is fixedly arranged above the bearing device, and is used for providing liquid to be coated for the substrate; and the driving device is connected with the base, and is used for driving the base to rotate relative to the accommodating groove and move up and down, so that the substrate cleaned by the cleaning device passes through the drum device among the drums for film coating with the drum and the liquid spray device, and is dried by the heating device after being coated with a film, so that the efficiency is increased, and the film coating quality is ensured.

Description

technical field [0001] The invention relates to a drum type coating equipment. Background technique [0002] Coating refers to the coating of single-layer or multi-layer thin films on the surface of optical components by physical or chemical methods. The coating process of optical components is usually as follows: first, install the optical components on the coating jig, and the coating jig is set in a container; secondly, seal the container, and vacuumize the container; then, use methods such as evaporation or sputtering in the The parts of the optical components that need to be coated are coated; finally, the container is opened, and the coated optical components are removed from the coating jig. That is to say, the existing evaporation or sputtering coating technology generally needs to be carried out under vacuum conditions, so that not only the equipment cost is high, but also when the coating material needs to be replaced, the vacuum needs to be re-evacuated so that t...

AI Technical Summary

Problems solved by technology

That is to say, the existing evaporation or sputtering coating technology generally needs to be carried out under vacuum conditions, so that not only the equipment cost is high, but also when the coating material needs to be replaced, the vacuum needs to be re-evacuated so that the coating does not Continuous, inefficient and difficult to guarantee coating quality

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