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Optical scanner, method of manufacturing optical scanner, and image forming apparatus

A scanner and image technology, applied in the field of optical scanners

Active Publication Date: 2012-04-04
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the inner movable plate cannot be rotated around the X-axis and the Y-axis under the same conditions
In addition, in the actuator of Patent Document 1, the magnetic field generated from the coil provided on the outer movable plate and the magnetic field generated from the coil provided on the inner movable plate interfere, and the inner movable plate cannot be rotated around the X-axis. and each axis of the Y axis rotates independently
Therefore, in the actuator of Patent Document 1, there is a problem that the inner movable plate cannot be rotated stably around each of the X-axis and the Y-axis.

Method used

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  • Optical scanner, method of manufacturing optical scanner, and image forming apparatus
  • Optical scanner, method of manufacturing optical scanner, and image forming apparatus
  • Optical scanner, method of manufacturing optical scanner, and image forming apparatus

Examples

Experimental program
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Effect test

no. 1 approach

[0047] The optical scanner of the first embodiment will be described.

[0048] figure 1 as well as figure 2 The shown optical scanner 1 has: a vibrating substrate 11 consisting of a movable part 2, a light reflection member 20 supported by the movable part 2, a support part 3 supporting the movable part 2, and a linkable The four connecting parts 4, 5, 6, and 7 of the moving part 2 and the supporting part 3 constitute; the base 12, which supports the vibrating substrate 11; and the displacement mechanism 8, which makes the movable Part 2 shifts. Hereinafter, each configuration of the optical scanner 1 will be sequentially described in detail.

[0049] 1-1. Vibration substrate 11

[0050] In the first embodiment, the vibrating substrate 11 (that is, the movable part 2, the support part 3, and the four connecting parts 4, 5, 6, 7) is formed by using dry etching, wet etching, or the like. Various etching methods remove unnecessary portions of the SOI substrate and form them...

no. 2 approach

[0174] refer to Figure 13 as well as Figure 5 An optical scanner according to a second embodiment will be described.

[0175] Although the optical scanner of the second embodiment has substantially the same structure as the first embodiment, the structure of the through hole is different. Therefore, the same reference numerals are attached to the same configuration and manufacturing method, and descriptions of the configuration, manufacturing method, and the like are omitted.

[0176] Such as Figure 13 As shown, the through hole 411 includes alignment surfaces 41X and 41Y and a relief portion 46 . The escape portion 46 is provided in contact with the two adjacent alignment surfaces 41X and 41Y. In addition to this relief portion 46 , three relief portions 46 are provided so as to be in contact with the surface constituting the through hole 411 together with the alignment surfaces 41X and 41Y. In addition, the escape portion 46 may be provided on the alignment surfaces ...

no. 3 approach

[0186] refer to Figure 14 An image forming apparatus according to a third embodiment will be described.

[0187] An image forming apparatus according to a third embodiment includes the optical scanners according to the first and second embodiments. Therefore, the same reference numerals are attached to the same configuration and manufacturing method, and descriptions of the configuration, manufacturing method, and the like are omitted.

[0188] The optical scanner 1 described above can be suitably applied to image forming devices such as projectors, laser printers, imaging displays, barcode readers, and scanning confocal microscopes, for example. Figure 14 It is a schematic diagram showing the outline of the image forming apparatus of the present invention. exist Figure 14 A projector 200 as an image forming apparatus is shown in . Here, the longitudinal direction of the projection screen 280 is referred to as "horizontal direction", and the direction at right angles to...

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PUM

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Abstract

The present invention provides an optical scanner, a method of manufacturing the optical scanner, and an image forming apparatus. The optical scanner includes: a light reflecting member provided with a light reflecting surface; a movable section which has the light reflecting member and which is rotatable around the central axis of rotation; at least a pair of movable beams extending from the movable section along the light reflecting surface; a displacement section which is connected to the movable beams; two driving beams which extend from the displacement section along a surface direction of the light reflecting surface so as to be perpendicular to the movable beams; a support section connected to each of the driving beams; a driving section which drives the displacement section. The displacement section has a through hole including two fixed surfaces crossing each other, the optical scanner also has a permanent magnet which is inserted in the through hole and is fixed to the two fixed surfaces.

Description

technical field [0001] The present invention relates to an optical scanner, a method of manufacturing the optical scanner, and an image forming apparatus. Background technique [0002] For example, an optical scanner configured with a torsional vibrator and using an actuator is known as an optical scanner that performs drawing by optical scanning in a laser printer or the like (for example, refer to Patent Document 1). [0003] Patent Document 1 discloses an actuator having an insulating substrate on which a pair of permanent magnets is provided and a scanner main body supported by the insulating substrate so as to be positioned between the pair of permanent magnets. Further, the scanner main body has a frame-shaped support portion, a frame-shaped outer movable plate provided inside the support portion, and an inner movable plate (mirror) provided inside the outer movable plate. In addition, the outer movable plate is connected to the support portion via a pair of first tor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/10
CPCG02B26/105G02B26/101
Inventor 渡边惠弥沟口安志中村真希子
Owner SEIKO EPSON CORP