Millimeter wave sample detection method and system
A detection system, millimeter wave technology, applied in the detection field, can solve the problems of inconvenient detection means and inaccurate detection results
Active Publication Date: 2015-09-16
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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Problems solved by technology
[0006] However, few millimeter waves are used in the detection field. Therefore, when detecting millimeter-scale samples, the current detection methods are inconvenient and the detection results are not accurate enough.
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[0029] Such as figure 1 Shown is the block diagram of the millimeter wave sample detection system. A millimeter wave sample detection system includes a millimeter wave signal transceiver module 10 , a two-dimensional translation stage 20 and a control module 30 .
[0030] The millimeter-wave signal transceiving module 10 is used to generate and send the millimeter-wave signal required for scanning and imaging the sample, and receive and process the millimeter-wave signal reflected back from the sample.
[0031] The two-dimensional translation stage 20 is used to install and drive the sample stage to move in a two-dimensional direction orthogonal to the millimeter wave signal transceiving module 10 .
[0032] The control module 30 is respectively connected with the millimeter-wave signal transceiver module 10 and the two-dimensional translation platform 20, and the control module 30 is used to set the moving direction parameter and the distance parameter of the two-dimensional...
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Abstract
The invention provides a system for detecting millimeter wave samples. The system comprises a millimeter wave signal receiving and transmitting module, a two-dimensional translation stage and a control module, wherein the millimeter wave signal receiving and transmitting module is used for generating and transmitting a millimeter wave signal desired for sample scan imaging, as well as receiving and processing the millimeter wave signal reflected by samples; the two-dimensional translation stage is used for mounting and driving a sample stage to move toward a two-dimensional direction orthogonal to the millimeter wave signal receiving and transmitting module; the control module is respectively connected with the millimeter wave signal receiving and transmitting module and the two-dimensional translation stage; the control module is used for setting a moving direction parameter and a distance parameter of the two-dimensional translation stage; the two-dimensional translation stage drives the sample stage to move according to the moving direction parameter and the distance parameter, which are set by the control module; and the control module reads the millimeter wave signal received by the millimeter wave signal receiving and transmitting module, and converts the read millimeter wave signal into a sample image. In addition, the invention further provides a method for detecting millimeter wave samples.
Description
technical field [0001] The invention relates to detection technology, in particular to a millimeter wave sample detection method and system. Background technique [0002] Millimeter wave: Electromagnetic waves with a wavelength of 1 to 10 millimeters are called millimeter waves. They are located in the wavelength range where microwaves and far-infrared waves overlap, so they have the characteristics of both spectra. The theory and technology of millimeter wave are the extension of microwave to high frequency and the development of light wave to low frequency. [0003] Compared with microwaves in lower frequency bands, millimeter waves have a wide range of available spectrum, large information capacity, and easy to achieve narrow beams and high-gain antennas, so they have high resolution, good anti-interference performance, and strong ability to penetrate plasma. , large Doppler frequency shift, high velocity measurement sensitivity, etc. Its disadvantages are severe propag...
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IPC IPC(8): G01N23/00
Inventor 金雷时华峰汪震
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI