SCDD (Silicon Carbide Derived Diamond) and CDC (Carbide Derived Carbon) preparation device
A preparation device and packaged technology, which is applied in the field of gas-solid reaction generating device, to achieve the effects of increasing reaction efficiency, sufficient reaction, and improving manufacturing efficiency and quality
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[0029] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0030] like Figure 1-2 shown.
[0031] A preparation device for SCDD and CDC, mainly composed of six parts: reaction chamber, workbench, heating system, cooling system, vacuum protection system, supply and exhaust system, such as figure 1As shown, the reaction chamber, heating system, and cooling system are inside the vacuum protection system. The reaction chamber includes a base 2 and a bell jar 12. The bell jar 12 is installed on the base 2 and forms a vacuum protection chamber 30, in which a reaction tube 13 (quartz material or other halogen-resistant group can be used) is installed in the vacuum protection chamber 30. element etching material), the reaction tube 13 is equipped with a workbench 15 for placing the reaction sample, and a metal sleeve 11 is set outside the reaction tube 13 corresponding to the position of the workbench 15, and an...
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