A fast and precise measurement method for distributed plane six-degree-of-freedom pose

A precision measurement and degree of freedom technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of low integration, high cost, complex structure, etc., and achieve the effect of reducing motion load, easy operation, and simple adjustment of optical path

Active Publication Date: 2015-09-02
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are many problems in the existing six-degree-of-freedom measurement technology, such as complex structure, low integration, and high cost, and it is necessary to continuously introduce new devices and new methods for improvement.

Method used

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  • A fast and precise measurement method for distributed plane six-degree-of-freedom pose
  • A fast and precise measurement method for distributed plane six-degree-of-freedom pose
  • A fast and precise measurement method for distributed plane six-degree-of-freedom pose

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Embodiment Construction

[0020] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] The structural diagram of the distributed planar six-degree-of-freedom rapid and precise measurement device of this embodiment is as follows: figure 1 As shown, the measurement device includes a corner cube prism 1 arranged on the platform to be tested 6, a light source assembly and a signal receiving assembly arranged on a measurement frame 11 which remains stationary during the measurement process, a signal acquisition and operation circuit board 9 and a main control Computer 10; described corner cube prism 1 and light source assembly and signal receiving assembly are 3 sets, and every set of light source assembly and signal receiving assembly are all fixed on the measuring frame 1l by mechanical mount 2; Described light source assembly includes being installed on Collimating lens 3 and laser diode 4 in light source box 5;...

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Abstract

The invention discloses a distributed rapid precise plane six-degree of freedom pose measuring device and a measuring method and belongs to the technical field of semiconductor fabrication equipment, and particularly relates to the distributed rapid precise plane six-degree of freedom pose measuring device. According to the distributed rapid precise plane six-degree of freedom pose measuring device, laser diodes are introduced to serve as light sources and two-dimension Phase-Sensitive Detectors (PSDs) are introduced to serve as photoelectric elements. The light source portion and the two-dimension PSDs are integrated, and therefore the size is reduced, the weight is lightened, and installation is convenient. In addition, three cube-corner prisms are arranged on a motion platform, and therefore motion load of the motion platform is reduced. To sum up, the distributed rapid precise plane six-degree of freedom pose measuring device is simple in structure and very appropriate for six-degree of freedom pose measurement on the high-speed motion platform. According to the distributed rapid precise plane six-degree of freedom pose measuring device, the cube-corner prisms arranged on the platform to be measured serve as position sensing elements, a three-dimensional coordinate system formed by the cube-corner prisms and the PSDs is converted into a motion coordinate system of the platform to be measured through transformation of coordinate systems, and therefore six-degree of freedom information can be obtained. And therefore the measuring method is easy and convenient to operate and adjustment of light paths is easy.

Description

technical field [0001] A distributed planar six-degree-of-freedom rapid and precise measurement device and method belong to the technical field of semiconductor manufacturing equipment, and specifically relate to a distributed planar six-degree-of-freedom rapid and precise measurement device and method. Background technique [0002] Multi-degree-of-freedom measurement technology plays a very important role in the fields of VLSI manufacturing, micro-optical component processing, nano-material manufacturing, and MEMS assembly and integration. With the rapid development of precision manufacturing technology, higher requirements are put forward for the attitude control of the multi-degree-of-freedom platform. For example, during the working process of the lithography machine, it is necessary to quickly and accurately measure the dynamic characteristics of the workpiece table's pose and speed. , and feed back the six-degree-of-freedom position error to the control system in real ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01B11/03
Inventor 黄向东谭久彬于文波
Owner HARBIN INST OF TECH
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