Management system of wafer acceptable test procedure and application method thereof

Abstract

The invention relates to a management system of a wafer acceptable test procedure and an application method of the management system. The management system of the wafer acceptable test procedure comprises a reading unit, a storage unit, an inquiry unit and a display unit. The storage unit is provided with product lot number data of a plurality of batches of products, testing machine number data, testing procedure name data, probe procedure name data, probe card type data, procedure grouping name data, machine property data, copper/non-copper wiring data, procedure establishing personnel job number data and test procedure detailed description data, wherein the testing machine number data, the testing procedure name data, the probe procedure name data, the probe card type data, the procedure grouping name data, the machine property data, the copper/non-copper wiring data, the procedure establishing personnel job number data and the test procedure detailed description data correspond to the product lot identification numbers of the various batches of products. The reading unit obtains operational data as required and transmits the operational data to the inquiry unit. The inquiry unit inquires data information which is stored in the storage unit and corresponds to the operational data and the corresponding data information is displayed through the display unit. According to the management system of the wafer acceptable test procedure and the application method, an operator is enabled to be clear about the fact that the wafer acceptable test procedure is carried out in a corresponding testing machine, testing efficiency is improved, and the factory cost of semiconductors is reduced.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a wafer acceptance test program management system and an application method thereof. Background technique [0002] In the semiconductor manufacturing process, it is necessary to go through hundreds of process steps before the semiconductor device can be prepared on the wafer. Due to the complexity of the process steps, it is necessary to perform a Wafer Acceptance Test (WAT) on each wafer. And indispensable. In semiconductor manufacturing, test efficiency is an important part of cost management. The higher the test efficiency, the faster the delivery time of semiconductor devices, and the lower the cost of semiconductors. [0003] However, since semiconductor factories produce many different types of products in each period of time, the procedures for wafer acceptance testing for each type of product are different, and the machines that can be used for testing are also...

AI Technical Summary

Problems solved by technology

[0008] In view of the above-mentioned problems, the present invention provides a management system and application method of a wafer acceptance test program, thereby overcoming the problem of which wafer should be carried out on which test machine for each product due to the fact that the operator is not clear and is not familiar with it. The test program is allowed, which leads to extremely low test efficiency, prone to stockpiling, and prolongs the delivery time of the product, thereby increasing the cost of the semiconductor factory.

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