Pollution testing device and method

Abstract

The invention provides a pollution testing device and method. The pollution testing device comprises an air inlet pipe, a static pressure cavity, a filter, an operating cavity, a fixed porous plate, an air return porous plate, an air return cavity and an air return pipe, wherein one end of the air inlet pipe is connected with an external air source, and the other end of the air inlet pipe is connected with the static pressure cavity; the filter is arranged between the static pressure cavity and the operating cavity; an opening is formed in the back surface of the operating cavity; the fixed porous plate is arranged at the bottom of the operating cavity; the air return porous plate is arranged between the operating cavity and the air return cavity; and one end of the air return pipe is connected with the air return cavity, and the other end of the air return pipe is connected with the air inlet pipe. According to the pollution testing device and method, multiple pollution tests can be realized, the characteristics that the material and the motion part release particles and molecular pollutants can be tested simultaneously, and the device is diversified in functions and simple in structure.

Description

technical field [0001] The invention relates to the field of environmental testing, and in particular to a pollution testing device and method. Background technique [0002] Most materials such as cables, pipes, and metal surfaces emit particles, even at normal temperature and pressure. Moving parts also release particles due to friction. These particles may be very small (0.1um-10um), but they are real. In the microelectronics industry, these particles are fatal, such as particles on silicon wafers or masks can cause missing exposure lines. In addition, the material releases molecular pollutants known as outgassing. Molecular contaminants are also the type of contaminants that are strictly regulated in the microelectronics industry. For example, NH3 will cause T-topping, SO2 and NH3 will cause ammonium sulfate mist, and condensable substances (boiling point greater than 150°C) will be deposited on the lens, which will affect the service life of the objective lens. [0...

AI Technical Summary

Problems solved by technology

After the concentration of pollutants volatilized by the material in a confined space reaches saturation, the speed of releasing pollutants will become very slow, so the test conditions provided by the above-mentioned environmental test chamber cannot really detect the characteristics of pollutants released by the test piece; And the wall surface of the test chamber liner may absorb the particles produced by the test piece due to static electricity, and the test chamber liner includes components that are prone to particle generation such as mixing devices, which will affect the test accuracy

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