Polishing grinding disc for restraining full-band error of optical surface

Abstract

The invention relates to a polishing grinding disc for restraining a full-band error of an optical surface. The polishing grinding disc is provided with a rotating shaft connecting end, a base, a flange ring, a diaphragm seal membrane, magnetorheological plasticine, a polishing pad, and a magnetic field generator, wherein the rotating shaft connecting end is located in a central position of an external upper part of the base; the base is provided with an annular boss; the annular boss is located on the outer side of a side wall; a group of fixedly connected screw holes are formed in the annular boss, and are centrosymmetric to the rotating shaft connecting end; the flange ring is an annular cylinder and is provided with a group of fixedly connected screw holes; the diaphragm seal membrane is in a bucket-shaped structure with the upper end opened; the magnetorheological plasticine is placed in a seal cavity formed by an inner wall and an upper surface of the diaphragm seal membrane as well as the bottom of the base; a boss of the diaphragm seal is fixedly connected with the annular boss of the base by the flange ring and bolts; the polishing pad is fixedly connected with a lower surface of the diaphragm seal membrane; and the magnetic field generator is placed on the upper surface of the external upper part of the base outside the grinding disc, controls magnetic field distribution in the seal cavity, generates a magnetic field parallel to a direction of a rotating shaft, and adjusts and controls a storage modulus and a loss modulus of the magnetorheological plasticine.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing, and in particular relates to a polishing disc for suppressing errors in the full frequency range of an optical surface. Background technique [0002] Since the 1960s, various computer-controlled surface shaping techniques (CCOS) have been proposed one after another. Due to the definite material removal and high convergence rate of CCOS, this technology has become the main processing technology for large-aperture and high-precision optical components. CCOS achieves a specific amount of material removal by controlling the dwell time of the subaperture polishing tool anywhere on the workpiece surface. Therefore, a stable and predictable material removal function plays a vital role in CCOS technology. For contact polishing, a stable removal function depends on close contact and reasonable force distribution between the polishing disc and the workpiece. Rigid grinding discs can maintai...

AI Technical Summary

Problems solved by technology

However, the development of passive semi-rigid grinding discs requires cumbersome and complicated finite element analysis for optical elements with specific surface shapes. The actual smoothness of the grinding discs needs to be verified and calibrated before use, which limits its wide application.

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