Reflection type point diffraction off-axis simultaneous phase shifting interference detection device and method
A technology of synchronous phase shifting and interference detection, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of increasing system complexity and achieve the effects of simple structure, improved overall performance, and high stability
Inactive Publication Date: 2013-09-25
HARBIN ENG UNIV
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This method has a very good anti-interference ability, but it has the disadvantage of the time phase shift coaxial method, and it needs the actuator to move the polarizer to achieve phase shift, which increases the complexity of the system
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[0032] The present invention includes a light source, a collimating beam expander system, and it also includes a first polarizer, a quarter-wave plate, an object to be measured, a first lens, a non-polarizing beam splitter, a second polarizer, and a plane reflector, with Plane mirror with pinhole, second lens, polarization beam splitter, image sensor;
[0033] According to the description of the light path, the beam emitted by the light source passes through the collimated beam expander system and then passes through the first polarizer quarter-wave plate and the object to be measured in turn, and the focused beam after passing through the first lens is divided into reflected ones by a non-polarizing beam splitter The object light and the transmitted reference light; the object light is irradiated on the first plane mirror after being filtered by the second polarizer, and the reference light is irradiated on the second plane mirror; the reflected object light and reference ligh...
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The invention belongs to the field of optical interference detection, and particularly relates to a reflection type point diffraction off-axis simultaneous phase shifting interference detection device. The device comprises a light source, a collimation and beam expanding system, a first polarizer, a quarter-wave plate, a first lens, an unpolarized beam splitter prism, a second polarizer, a plane mirror, a plane mirror with small holes, a second lens, a polarized beam splitter prism and an image sensor. According to the reflection type point diffraction off-axis simultaneous phase shifting interference detection device, the CCD bandwidth usage tatio, the CCD field usage ratio, the measurement real-time performance, the anti-interference capacity and the system complexity are all considered so that the whole performance of the system can be improved. The reflection type point diffraction off-axis simultaneous phase shifting interference detection device is simple in structure and low in cost. The light path does not need to be changed in operation, no experimental apparatus needs to be moved, and the reflection type point diffraction off-axis simultaneous phase shifting interference detection device is convenient and flexible to operate, high in stability and low in system complexity.
Description
technical field [0001] The invention belongs to the field of optical interference detection, in particular to a reflective point diffraction off-axis synchronous phase-shifting interference detection device and a special detection method thereof. Background technique [0002] Optical phase-shifting interferometry is a non-contact, high-precision full-field measurement method, which is widely used in the fields of optical surface, deformation and thickness measurement. Commonly used interferometry methods include off-axis interferometry, time coaxial interferometry and space coaxial interferometry. Off-axis interferometry separates the terms needed to recover the phase from the interfering terms by introducing a tilt angle between the object and reference beams, causing the interferogram to generate a carrier wave. However, the introduction of the carrier makes the bandwidth of the CCD not fully utilized. The time and space coaxial interferometry does not need to introduce ...
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IPC IPC(8): G01B11/00
Inventor 单明广钟志郝本功刁鸣张雅彬窦峥
Owner HARBIN ENG UNIV