A reflective point diffraction off-axis synchronous phase-shifting interference detection device and detection method
A technology of synchronous phase shifting and interference detection, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of increasing system complexity and achieve the effect of simple structure, low system complexity, convenient and flexible operation
Inactive Publication Date: 2016-01-27
HARBIN ENG UNIV
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
This method has a very good anti-interference ability, but it has the disadvantage of the time phase shift coaxial method, and it needs the actuator to move the polarizer to achieve phase shift, which increases the complexity of the system
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0032] The present invention includes a light source, a collimated beam expanding system, and it also includes a first polarizer, a quarter wave plate, an object to be measured, a first lens, a non-polarizing beam splitter prism, a second polarizer, a plane mirror, and Small hole plane mirror, second lens, polarization beam splitter, image sensor;
[0033] According to the description of the light path, the light beam emitted by the light source passes through the first polarizer quarter-wave plate and the object to be measured after the collimated beam expander system, and the focused light beam after the first lens is divided into and reflected by the non-polarizing beam splitter prism The object light and the transmitted reference light; the object light is filtered by the second polarizer and irradiated on the first plane reflector, and the reference light is irradiated on the second plane reflector; the reflected object light and reference light pass through the non-polarizin...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention belongs to the field of optical interference detection, and particularly relates to a reflection type point diffraction off-axis simultaneous phase shifting interference detection device. The device comprises a light source, a collimation and beam expanding system, a first polarizer, a quarter-wave plate, a first lens, an unpolarized beam splitter prism, a second polarizer, a plane mirror, a plane mirror with small holes, a second lens, a polarized beam splitter prism and an image sensor. According to the reflection type point diffraction off-axis simultaneous phase shifting interference detection device, the CCD bandwidth usage tatio, the CCD field usage ratio, the measurement real-time performance, the anti-interference capacity and the system complexity are all considered so that the whole performance of the system can be improved. The reflection type point diffraction off-axis simultaneous phase shifting interference detection device is simple in structure and low in cost. The light path does not need to be changed in operation, no experimental apparatus needs to be moved, and the reflection type point diffraction off-axis simultaneous phase shifting interference detection device is convenient and flexible to operate, high in stability and low in system complexity.
Description
Technical field [0001] The invention belongs to the field of optical interference detection, and particularly relates to a reflection type point diffraction off-axis synchronous phase shift interference detection device and a special detection method thereof. Background technique [0002] Optical phase-shifting interferometry is a non-contact, high-precision full-field measurement method, which is widely used in the measurement fields of optical surface, deformation and thickness. Commonly used interference methods include off-axis interferometry, time coaxial interferometry and space coaxial interferometry. Off-axis interferometry introduces an inclination angle between the object light and the reference light, so that the interferogram generates a carrier wave, thereby separating the term needed to restore the phase from the interference term. However, the introduction of the carrier makes the bandwidth of the CCD not fully utilized. The time and space coaxial interferometry ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
Inventor 单明广钟志郝本功刁鸣张雅彬窦峥
Owner HARBIN ENG UNIV