MEMS accelerometer with temperature compensation function

Abstract

The invention relates to an MEMS accelerometer with the temperature compensation function. The MEMS accelerometer with the temperature compensation function comprises an acceleration sensor, a temperature sensor and a temperature compensation chip, wherein the acceleration sensor and the temperature sensor are connected with the temperature compensation chip. A temperature compensation method adopted by the temperature compensation chip comprises the steps that (1), zero biases and a set of output values of a scale factor are measured under a plurality of temperature points, the zero biases and the output values are fitted to be a fitting surface, and a series of fitting coefficients are obtained and arranged to be a coefficient matrix; (2), modeling is carried out on output signals of the acceleration sensor and the output signals of the temperature sensor so as to be expressed as a model matrix; (3), dot product is carried out on the coefficient matrix and the model matrix so as to obtain an output formula after the acceleration sensor obtains the temperature compensation; (4), the fitting coefficients and the output formula are written into the temperature compensation chip to be calculated. Through three-dimensional fitting of the surface and compensation after calculation, influence on a system from errors generated when the accelerometer is assembled and installed is reduced effectively.

Description

technical field [0001] The invention relates to a MEMS accelerometer, in particular to a MEMS accelerometer with a temperature compensation function. Background technique [0002] MEMS (Micro Electro-Mechanical System) accelerometer is one of the important sensors in the micro-miniature inertial navigation system, and its performance directly affects the navigation accuracy of the inertial navigation system. The measurement output error of MEMS accelerometer mainly comes from the manufacturing process, installation method, external environment and other aspects. Among them, the impact of ambient temperature on the measurement output of MEMS accelerometer is particularly prominent, and it has also become a key issue in the engineering application of micro accelerometers. [0003] At present, local temperature control and software methods are commonly used to realize temperature compensation. Local temperature control usually needs to change the internal structure and materia...

AI Technical Summary

Problems solved by technology

[0012] Therefore, the traditional accelerometer not only has relatively high requirements for the assembly and installation of the accelerometer during temperature compensation, but also needs to compensate the zero position and scale factor of the accelerometer separately

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