Orthogonal standardization method and device for two-way interference signals
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NAT INST OF METROLOGY CHINA
- Publication Date
- 2016-11-16
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Abstract
Description
technical field
[0001] The invention relates to the technical field of metrology and testing, in particular to a method and device for orthogonal standardization of two-way interference signals. Background technique
[0002] Laser interferometry refers to a measurement method that uses the principle of interference to determine related physical quantities. Laser interferometry has high measurement sensitivity and precision, and can be used for the measurement of displacement, length, angle, medium refractive index change and vibration. When performing laser interferometry, the interferometer usually first generates an interference signal; then a computer or other device calculates the measurement result based on the interference signal. The interference signal generated by the interferometer is usually a two-way interference signal, one of which may be called a first interference signal, and the other may be called a second interference signal. When calculating the measure...