Deposition device and method of manufacturing organic light-emitting display device using same

A technology of deposition device and manufacturing method, which is applied in lighting device, electroluminescent light source, semiconductor/solid-state device manufacturing, etc., can solve problems such as penetration of organic substances, achieve high resolution, and suppress shadow phenomenon.

Active Publication Date: 2018-09-21
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, depending on the angle at which the deposition material is sprayed and reaches the substrate, a shadow phenomenon occurs in which the organic material penetrates between the deposition mask and the substrate

Method used

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  • Deposition device and method of manufacturing organic light-emitting display device using same
  • Deposition device and method of manufacturing organic light-emitting display device using same
  • Deposition device and method of manufacturing organic light-emitting display device using same

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Embodiment Construction

[0032] Hereinafter, a deposition apparatus according to the present invention and a method of manufacturing an organic light emitting display device using the deposition apparatus will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and can be implemented in other various forms. These embodiments are only intended to fully disclose the present invention and to fully inform those skilled in the art of the scope of the invention. supply. In the drawings, the same reference numerals designate the same elements.

[0033] In addition, throughout the entire specification, when it is stated that a certain part "includes" a certain constituent element, unless otherwise specifically mentioned, it will mean that other constituent elements may also be included rather than excluded. In addition, throughout the entire specification, when it is expressed as "on", it means that it is locate...

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Abstract

The deposition device according to the present invention includes: a deposition source for containing deposition materials; and a plurality of nozzles arranged on one side of the deposition source along a first direction and used for spraying the deposition materials onto an opposite substrate. The deposition source is divided into a central area and peripheral areas at two ends of the central area based on the first direction. The deposition device further includes: detachably formed on the nozzles arranged on the respective peripheral regions, and such that an end surface for spraying the deposition substance is formed to form an inclination with the substrate surface along the first direction Angle and the top of the nozzle toward the outside of the deposition source. According to the embodiments of the present invention, by increasing the incident angle of the deposition material incident on the substrate, the shadow phenomenon of the deposition material penetrating into the deposition mask and the substrate can be suppressed, the deposition margin can be reduced, and the deposition uniformity and deposition efficiency can be improved. Thereby, high resolution of the organic light emitting display device can be easily realized.

Description

technical field [0001] The present invention relates to a deposition device and a method for manufacturing an organic light-emitting display device using the same, in particular to a deposition device capable of preventing shadowing by controlling the angle at which a deposition material is sprayed, and a method for manufacturing an organic light-emitting display device. Background technique [0002] Among display devices, organic light-emitting display devices not only have the advantages of wide viewing angle and excellent contrast ratio, but also have advantages such as fast response speed, and thus are attracting attention as next-generation display devices. [0003] Generally, in order to realize colors by recombining holes and electrons injected from the anode and cathode in the light emitting layer to emit light, the organic light emitting display device has a stacked structure in which the light emitting layer is inserted between the anode and the cathode. However, i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/455H01L51/56
CPCH05B33/10
Inventor 白大源
Owner SAMSUNG DISPLAY CO LTD
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