Compensator and Coaxial Adjustment Method of Compensator and Interferometer

Abstract

The invention discloses a compensator and a coaxial adjustment method of the compensator and an interferometer, belonging to the field of optical technology. The technical problem of low precision and low efficiency in the adjustment method of the coaxiality of the compensator and the interferometer in the prior art is solved. The compensator of the present invention includes a compensation mirror and a field lens arranged sequentially along the same optical axis from front to back, and also includes an optical reference plane mirror, the optical reference plane mirror does not block the light aperture of the compensation mirror, and the normal direction of the optical reference plane mirror and the compensation The angle between the optical axis of the mirror is less than or equal to 3 seconds, and the reflective surface of the optical reference plane mirror is in front. The compensator of the invention can be used for aspheric surface detection, and the coaxial precision of the compensator and the interferometer can be improved, thereby improving the detection and processing precision of the aspheric surface.

Description

technical field [0001] The invention relates to the field of optical technology, in particular to a compensator and a method for adjusting the coaxiality of the compensator and the interferometer. Background technique [0002] In the process of processing and testing large aspheric mirrors, it is often necessary to use compensators to achieve interference testing. Compensators can be divided into refractive optical compensators, reflective optical compensators and diffractive optical compensators by type. The Offner compensator is the most commonly used type of refraction compensator. It is generally composed of two lenses, that is, the compensation mirror and the field mirror. After that, it returns to the interferometer through the compensator again, and forms interference fringes with the reference beam. In order to facilitate the adjustment of the detection optical path, the incident light of the Offner compensator is generally designed as a plane wave. [0003] When ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the technical problems of low efficiency and low precision of the coaxial adjustment method of the compensator and the interferometer in the prior art, and provide a compensator and a coaxial adjustment method of the compensator and the interferometer

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