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Grinding device

A technology for grinding and grinding surfaces, applied in abrasive surface adjustment devices, parts of grinding machine tools, grinding/polishing equipment, etc., can solve the problem of fast consumption of dressing plates, and achieve the effect of prolonging replacement intervals and suppressing consumption.

Active Publication Date: 2018-09-11
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, only the part touching the track of the grinding stone is used for dressing, and the other parts are not used for dressing, so there is a problem that the dressing plate is consumed quickly

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0026] figure 1 The shown grinding device 10 has a chuck table 11 holding a workpiece 20, a grinding unit 12 for grinding the workpiece 20 held on the chuck table 11, and the grinding unit 12 is positioned in the ±Z direction. Grinding feed unit (not shown) moving on (grinding feed direction). The grinding feed unit brings the grinding unit 12 close to the chuck table 11 by moving the grinding unit 12 in the −Z direction, or moves the grinding unit 12 away from the chuck table 11 by moving the grinding unit 12 in the +Z direction.

[0027] The chuck table 11 has a holding surface 111 formed of a porous material or the like, and rotates about a rotation axis 119 parallel to the ±Z direction. The workpiece 20 is placed on the holding surface 111 perpendicular to the ±Z direction, and is sucked by a suction source (not shown), thereby sucking and holding the workpiece 20 . The workpiece 20 held on the holding surface 111 rotates around the rotation shaft 119 as the chuck table ...

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PUM

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Abstract

PROBLEM TO BE SOLVED: To prevent formation of a step on an upper surface of a dresser board and suppress consumption of the dresser board.SOLUTION: A grinding device 10 comprises at least dressing means 14 for dressing a grinding surface of a grinding stone 132 contacting a work piece 20 held by a chuck table 11. The dressing means 14 comprises: a holding portion 141 for holding a disc-shape dresser board 15; pressing means 142 that moves the holding portion 141 in directions of approaching toward and separating from the grinding surface and presses an upper surface of the dresser board 15 against the grinding surface; and rotating means 145 that rotates the holding portion 141 around a rotation shaft arranged on an orbit of the grinding stone 132. The upper surface of the dresser board 15 is pressed against the grinding surface of the grinding stone 132 by predetermined pressing force while rotating the holding portion 141 to contact the grinding surface of the grinding stone 132 with the whole upper surface of the dresser board 15.

Description

technical field [0001] The present invention relates to a grinding device for grinding a workpiece. Background technique [0002] In a grinding device that grinds a workpiece by pressing a grinding stone, since grinding may cause clogging or clogging of the grinding stone, the grinding stone is ground during grinding. Dressing of a chamfered surface by pressing a trimming board (for example, refer to Patent Document 1). [0003] Patent Document 1 Japanese Unexamined Patent Application Publication No. 2011-189456 [0004] However, although the portion of the upper surface of the dressing plate that touches the track of the grinding stone is ground by the grinding stone, the other portion is not ground, so it will be on the upper surface of the dressing plate. form a difference. If dressing is continued in this state, not only the grinding surface of the grinding stone but also the side surface of the grinding stone will be dressed. In addition, only the part touching the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/304
CPCB24B7/04B24B53/00B24B53/12
Inventor 高田畅行五木田洋平
Owner DISCO CORP
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