Movable device having drop resistive protection
A technology of moving range and mass block, applied in measuring devices, microstructure devices, microstructure devices composed of deformable elements, etc. problem, to achieve good protection function, good impact resistance and drop resistance, and improve the effect of drop resistance protection function
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[0047] image 3 is a schematic cross-sectional view of a movable device according to an embodiment of the present invention. Figure 4 yes image 3 A top view of some components of the movable device. Please refer to image 3 and Figure 4 , the movable device 100 of this embodiment is, for example, a microelectromechanical accelerometer and includes a base 110 , a mass 120 and a plurality of elastic parts 130 . The base 110 includes a first base body 112 , a second base body 114 and a connecting portion 116 , and the connecting portion 116 is fixed between the first base body 112 and the second base body 114 . The mass block 120 is located between the first seat body 112 and the second seat body 114 and has a plurality of side faces 120a and opposite end faces, and the two end faces are the top face 120b and the bottom face 120c of the mass block 120 and are perpendicular to each side face 120a .
[0048] The elastic portions 130 are respectively connected to the side s...
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