High spatial resolution laser confocal spectroscopy-mass spectrometry microscopy imaging method and device
A high-spatial-resolution, micro-imaging technology, applied in the direction of measuring devices, analytical materials, material excitation analysis, etc., can solve the problem of low spatial resolution of mass spectrometry detection, large laser focus spot, inability to neutralize atoms, molecules, and neutral ions and group detection to improve spatial resolution and suppress drift
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Embodiment 1
[0053] The embodiment of the present invention is based on Figure 4 The shown high spatial resolution laser confocal spectrum-mass spectrometer imaging device includes a laser point light source system 24, a collimator lens 25 placed along the optical axis direction, an exit beam attenuator 34, a ring light generation system 3, and a beam splitter 5 , the middle hole color separator 6 and the middle hole measurement objective lens 7 which is located in the refraction direction of the optical axis and focuses the light beam reflected by the middle hole color separator 6 to the measured sample 8, including the reflected light intensity of the focused light spot of the middle hole measurement objective lens 7 The confocal light intensity detection system consisting of the detection beam attenuator 35, the collecting lens 12, the light intensity point detector 2 located at the focal point of the laser lens 12, and the plasma for detecting the focused light spot of the middle hole ...
Embodiment 2
[0075] Such as Figure 4 As shown, in the high-spatial-resolution laser confocal mass spectrometer imaging device of Embodiment 1, the computer 10 can use the position z corresponding to the maximum value M of the confocal axial intensity curve 15 B The value is used to control the axial objective lens scanner 11 so that the focusing spot of the middle hole measurement objective lens 7 is focused on the measured sample 8, and the plasma plume 9 is generated by desorption and ionization.
Embodiment 3
[0077] Such as Figure 5As shown, in the high spatial resolution laser confocal spectrum-mass spectrometer imaging device of Embodiment 1, the ring light generation system 3 is replaced by a vector beam generation system 21 and a pupil filter 22 placed along the optical axis direction to generate a vector beam , a ring-shaped beam 23 is generated, which is reflected by the center-hole color separator 6 and focused by the center-hole measurement objective lens 7 to irradiate the measured sample 8 with a tiny spot exceeding the diffraction limit.
[0078] The remaining imaging measurement methods are the same as in Example 1.
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