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Sprinkler with removable gas distribution plate

A technology of gas distribution plate and sprinkler head, which is applied in the direction of spraying device, spraying device, electrical components, etc., and can solve the problems of expensive replacement and processing

Active Publication Date: 2017-12-19
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the inventors have observed that because the gas distribution plate is permanently bonded to the base, the entire showerhead assembly needs to be replaced to replace the gas distribution plate, thus resulting in an expensive replacement process

Method used

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  • Sprinkler with removable gas distribution plate
  • Sprinkler with removable gas distribution plate

Examples

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Embodiment Construction

[0011] Embodiments of showerheads with removable gas distribution plates are provided. In at least some embodiments, the inventive showerhead may advantageously allow removal and replacement of the gas distribution plate, as compared to conventional showerheads that have the gas distribution plate permanently bonded thereto, Hereby a shower head is provided which has a long service life and which allows the replacement of the gas distribution plate in a cost-effective manner.

[0012] figure 1 The figure shows a showerhead with a gas distribution plate according to some embodiments of the invention. The showerhead 100 generally includes a body 102 , a gas distribution plate 104 , and a clamp 110 configured to removably couple the gas distribution plate to the body 102 .

[0013] The main body 102 (ie, the base) includes a first side 150 , a second side 140 and a plurality of through holes 116 formed in the main body 102 and extending from the first side 150 to the second sid...

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PUM

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Abstract

Embodiments of showerheads with removable gas distribution plates are provided. In some embodiments, a showerhead for use in a semiconductor processing chamber may include: a pedestal having a first side and a second side; a gas distribution plate disposed adjacent to the pedestal the second side of the seat; and a clamp disposed near a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal pad disposed on the base between the base and the gas distribution plate.

Description

technical field [0001] Embodiments of the invention relate generally to semiconductor processing equipment. Background technique [0002] Conventional showerheads used in semiconductor processing chambers (eg, deposition chambers, etch chambers, or the like) typically include a gas distribution plate permanently bonded to a susceptor. Due to degradation from exposure to the plasma during plasma processing, the gas distribution plate requires periodic replacement. However, the inventors have observed that because the gas distribution plate is permanently bonded to the base, the entire showerhead assembly needs to be replaced to replace the gas distribution plate, thus resulting in an expensive replacement process. [0003] Accordingly, the inventors provide an embodiment of an improved showerhead having a removable gas distribution plate. Contents of the invention [0004] Embodiments of showerheads with removable gas distribution plates are provided. In some embodiments...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/205H01L21/3065
CPCC23C16/45565H01J37/3211H01J37/32146H01J37/32183H01J37/3244H01J37/32467H01J37/32522H01J37/32623B05B1/005H01L21/02H01L21/67011H01L21/67207B05B1/185
Inventor D·卢博米尔斯基V·克尼亚齐克H·诺巴卡施J·德拉 罗萨Z·J·叶J·Y·孙S·班达
Owner APPLIED MATERIALS INC
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