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Stopcock, liquid supply method, liquid supply device, and coating device

A liquid supply and plug valve technology, applied in the field of plug valves, can solve problems such as accumulation of foreign matter

Active Publication Date: 2018-05-29
AIMECHATEC LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, in conventional cock valves, foreign matter (liquid deposits, etc.) tends to accumulate in the gap between the cock member and the valve body. Therefore, when the liquid supply path is opened by turning the cock member, the foreign matter may flow to the downstream side of the valve.

Method used

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  • Stopcock, liquid supply method, liquid supply device, and coating device
  • Stopcock, liquid supply method, liquid supply device, and coating device
  • Stopcock, liquid supply method, liquid supply device, and coating device

Examples

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Embodiment Construction

[0060] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In this embodiment, an application device provided with a stopcock on a liquid supply line will be described as an example. The coating apparatus of this embodiment is used to coat a chemical solution (liquid) such as photoresist, which has relatively high viscosity and may generate foreign matter, on a semiconductor substrate (wafer).

[0061] In addition, in order to understand features easily, the drawings used in the following description may show characteristic parts enlarged for convenience, and the dimensional ratio of each component is not necessarily the same as the actual one.

[0062] figure 1 It is a figure which shows the schematic structure of a coating apparatus.

[0063] Such as figure 1 As shown, the coating device 100 of this embodiment includes: a liquid supply source 10; a liquid supply path 11; a valve 20 capable of closing (opening and...

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PUM

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Abstract

The present invention provides a stopcock, a liquid supply method, a liquid supply device, and a coating device capable of suppressing inflow of foreign matter. The present invention relates to a cock valve capable of closing a supply path of a liquid by rotating a cock member attached to a valve body. The cock member includes a cock-side groove formed on an outer surface. The valve main body includes: a liquid inflow port through which liquid flows in; a liquid outflow port through which liquid flows out; and a main body side groove facing the outer surface of the cock member. In addition, the cock valve is switched between a first state and a second state corresponding to the rotation of the cock member, and in the first state, the liquid inflow port, the liquid outflow port and the groove on the main body side pass through the cock. In the second state, the liquid inlet, the liquid outlet, and the main body side groove are bypassed without passing through the cock side groove.

Description

technical field [0001] The present invention relates to a stopcock, a liquid supply method, a liquid supply device, and a coating device. [0002] this application claims priority based on Japanese Patent Application No. 2014-088191 for which it applied to Japan on April 22, 2014, and uses the content here. Background technique [0003] High-viscosity liquids such as medicinal liquids require high pressure when they are discharged. In contrast, conventionally, as a valve for supplying such a high-viscosity liquid, a plug valve excellent in pressure resistance is known (for example, refer to Patent Document 1). This cock valve includes a valve body and a cock member rotatably attached to the valve body. Further, the cock valve can supply liquid by rotating the cock member so that the through hole formed in the cock member communicates with the liquid supply path provided in the valve main body. [0004] prior art literature [0005] patent documents [0006] Patent Docum...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/175
Inventor 近藤士朗
Owner AIMECHATEC LTD