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Laser patterning of multilayer structures

A multi-layer structure and laser engraving technology, applied in the field of laser engraving, can solve the problems of adjacent layer structure changes and other problems

Active Publication Date: 2017-12-15
NLIGHT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The small spacing between these layers has been a problem when patterning these layers, especially because existing laser techniques generate a lot of heat for the ablation of selected layers, often resulting in subsequent or adjacent layers structural changes

Method used

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  • Laser patterning of multilayer structures
  • Laser patterning of multilayer structures
  • Laser patterning of multilayer structures

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Embodiment Construction

[0011] In general, the processes and materials discussed herein can be used in the fabrication of touch sensors and other applications for conductive substrates. Touch sensors typically consist of thin-film composites of different materials stacked together by one or more deposition or lamination processes. Various layered structures are possible, and various intermediate processing steps may be implemented in the fabrication of the multiple layers. For example, the various multilayer structures described herein may have the layers arranged in a different order, as shown in the disclosed figures. In some embodiments, the layer of deposition material may be disposed on one or both sides of the substrate. In a further embodiment, as shown, the pulsed laser beam can be incident from the opposite direction. Different types of materials may be used for the different layers, only some suitable examples are discussed herein. It should be understood that many different configuratio...

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Abstract

A method for non-ablative laser patterning of a multilayer structure is disclosed, the multilayer structure comprising: a substrate, a first layer disposed on the substrate, a second layer disposed on the first layer and a third layer disposed on said second layer, the method comprising: generating at least one laser pulse having a frequency selected to non-ablatively alter the conductivity of a selected portion of the third layer such that the selected portion a laser parameter that becomes non-conductive; and directing the pulse to the multilayer structure; wherein the conductivity of the first layer is not substantially changed by the pulse.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to provisional applications 61 / 767,420, filed February 21, 2013, 61 / 818,881, filed May 2, 2013, and 61 / 856,679, filed September 9, 2013, for any and The respective disclosures of these applications are incorporated by reference in their entirety into this application for all purposes. technical field [0003] In general, the present invention relates to the field of laser patterning. More specifically, the present invention relates to patterning methods for multilayer laminates. Background technique [0004] In the electronics industry, touch screens are starting to gain traction due to the increasing demand for smartphones, tablets, and all-in-one computers. One of the industrial goals is to reduce the overall thickness of the device, so to reduce the thickness of the touch sensor as part of a thinner device. One solution is to use a single-layer film to reduce the sensor thickness....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/268H01L21/428H01L31/18B82Y40/00
CPCB82Y40/00C22F1/14
Inventor A·迪特利R·J·马丁森
Owner NLIGHT INC