An ultrasonic atomization pyrolysis spraying device and its application method

Abstract

The invention relates to an ultrasonic atomization pyrolysis spraying device comprising a substrate, the substrate is used to place multiple groups of samples to be sprayed; and a rotating mechanism, the rotating mechanism includes a first rotating mechanism and a second rotating mechanism, the first rotating mechanism is provided with The liquid mixer, the liquid mixer holds the solution to be sprayed, the second rotating mechanism is equipped with an atomizing nozzle, the first rotating mechanism and the second rotating mechanism rotate periodically in reverse, and can reach the spraying area above the substrate synchronously and cooperate with each other The sample to be sprayed on the sheet is sprayed. The present invention also provides a method for using the above-mentioned ultrasonic atomization pyrolysis spraying device, including providing the above-mentioned ultrasonic atomization pyrolysis spraying device, placing multiple groups of samples to be sprayed on the substrate; mechanism and the second rotating mechanism; when the first rotating mechanism and the second rotating mechanism reach the spraying area above the substrate synchronously, the liquid mixer of the first rotating mechanism cooperates with the atomizing nozzle of the second rotating mechanism to spray the sample on the substrate Go ahead and spray.

Description

【Technical field】 [0001] The invention relates to a thin film preparation device, in particular to an ultrasonic atomization pyrolysis spraying device and a use method thereof. 【Background technique】 [0002] High-performance thin film materials have very important applications in the fields of modern communication technology, photoelectric technology, photocatalysis, new energy, aviation and national defense. These materials are usually composed of binary or more elements, and the composition and structure of the materials are different, often resulting in huge differences in various physical and chemical properties of the materials. [0003] The emergence of high-throughput combined material chip technology can greatly speed up the research and development process of new materials, and can complete the traditional "trial and error" work of several months or even years in a relatively short period of time. The core of this technology is to rely on physical gas phase Deposi...

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Problems solved by technology

[0006] However, the existing high-throughput ultrasonic atomization pyrolysis spraying equipment has a single atomization nozzle, which can only spray a single sample, and cannot realize sample pipeline spraying, which reduces the film preparation efficiency

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