High-dynamic-precision large-working-distance self-collimating device and method

Abstract

The invention belongs to technical field of precision measurement and the field of optical engineering and particularly relates to a high-dynamic-precision large-working-distance self-collimating device and method. The high-dynamic-precision large-working-distance self-collimating device consists of a light source, a collimating lens, a reflector and a feedback imaging system. According to the method, a reflected light beam returns to the image plane center of the feedback imaging system by adjusting the collimating lens, and then angle change of the surface of a measured object is obtained by utilizing an angle deflection measurement device on the reflector. Due to the fact that the reflector is added on a traditional self-collimating angle measurement system, the problem that the reflected light of the measured object deflects from the measurement system and accordingly measurement cannot be performed can be avoided, a self-collimating work range is further added under the condition of the same working distance, and the technical advantages of the working distance are increased in the same self-collimating work range. In addition, the specific designs of the collimating lens, the feedback imaging system, the reflector and the like make the high-dynamic-precision large-working-distance self-collimating device further have the technical advantages of being simple in structure, low in manufacturing cost and meanwhile capable of monitoring the assembly process of the measure object in the whole process and achieving rapid measurement.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and specifically relates to an autocollimation device and method with high dynamic precision and large working distance. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundred...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the la

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