Method and device for obtaining angular velocity of gyro sensor
A technology for obtaining device and angular velocity, which is applied in the direction of gyro effect for velocity measurement, gyroscope/steering sensing equipment, instruments, etc., which can solve problems such as increased power consumption
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[0037] According to one embodiment, it is a method of acquiring an angular velocity of a gyro sensor, comprising the step of detecting a vibration in a second direction based on a Coriolis force acting on a movable body vibrating in a first direction. A predetermined physical quantity of amplitude; the angular velocity of the movable body is calculated based on the detected predetermined physical quantity detected when the vibration in the second direction by the Coriolis force is in an unsteady state.
[0038] Embodiments will be described below with reference to the drawings.
[0039] Figure 1A is a plan view schematically showing the structure of the gyro sensor according to the embodiment. The gyro sensor is formed using MEMS technology.
[0040] Figure 1A The shown gyro sensor 10 includes a y-direction movable part 11y and an x-direction movable part 11x as a movable body (movable part) 11 . The y-direction movable portion 11y constitutes a y-direction mass of the mov...
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