A clean room with fans neatly arranged
A technology of ultra-clean rooms and fans, applied in the field of ultra-clean rooms, can solve the problems of messy arrangement of fans, unfavorable construction and management, complex structure, etc., and achieve the effect of neat arrangement of fans, simple structure and low cost
Active Publication Date: 2018-11-27
JIANGSU ZHONGHAN COMM TECH
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Problems solved by technology
The problem of the existing ultra-clean room is mainly that the structure is complex and the arrangement of the fans is messy, which is not conducive to construction and management
Method used
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Embodiment Construction
[0009] figure 1 is a schematic diagram of the present invention. like figure 1 As shown, the clean room of the present invention comprises an air inlet end 1 arranged at the front end of the clean room, an air outlet end 2 arranged at the rear end of the clean room and an air outlet 3 arranged on the left and right sides of the inside of the clean room; An operation channel 4 is arranged on the central axis of the left and right sides of the room, and lifting equipment 5 is arranged on both sides of the operation channel 4; A storage rack 8 is placed in the storage area 7; the rear end of the clean room is also provided with a door 9 for the operator to enter and exit; the air inlets of the air outlet 2 are arranged on the left and right sides of the door 9, and the The air outlets are arranged on the left and right walls of the clean room. The air inlet 1 is provided with a plurality of fan units 10 arranged in parallel, and the fan units 10 are all installed against the f...
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The invention discloses an ultra-clean chamber with fans arrayed in order. The ultra-clean chamber comprises an air inlet end arranged at the front end of the ultra-clean chamber, air outlet ends arranged at the rear end of the ultra-clean chamber and air passing channels arranged on the left edge and the right edge of the inner side of the ultra-clean chamber. An operation channel is arranged at the central axis of the left side and the right side of the ultra-clean chamber, and lifting devices are arranged on the two sides of the operation channel. A storage area which is through left and right is arranged between each lifting device and the corresponding air passing channel, and storage racks are placed in the storage areas. A door allowing operators to come in and out is further arranged at the rear end of the ultra-clean chamber. Air inlets of the air outlet ends are formed in the left side and the right side of the door, and air outlets of the air outlet ends are formed in the left wall and the right wall of the ultra-clean chamber. The ultra-clean chamber with the fans arrayed in order is simple in structure; the fans are arrayed in order; all facilities in the air passing channels and the ultra-clean chamber are neat and clear; a good cleaning effect can be achieved; and the facilities are arrayed reasonably and suitable for being operated by the operators.
Description
technical field [0001] The invention relates to semiconductor manufacturing technology, in particular to a clean room with fans arranged neatly. Background technique [0002] Clean rooms are used in the pharmaceutical industry or the semiconductor manufacturing industry. When making wafers, TFTs or LCDs, clean rooms are required. The main function of clean rooms is to control the cleanliness and temperature of the atmosphere that the products come into contact with. Humidity, so that the product can be produced and manufactured in a good environmental space. The problems of the existing clean room mainly lie in the complex structure and the disorderly arrangement of fans, which is not conducive to construction and management. SUMMARY OF THE INVENTION [0003] On the basis of the prior art, the present invention discloses a clean room with fans arranged neatly. [0004] The technical scheme of the present invention is as follows: [0005] A clean room with neatly arrange...
Claims
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IPC IPC(8): F24F7/00
CPCE04H5/02F24F7/00
Inventor 吕耀安
Owner JIANGSU ZHONGHAN COMM TECH