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Infrared optical fiber for detecting sulfur hexafluoride gas and preparation method thereof

A technology of sulfur hexafluoride gas and infrared filter, which is applied in optics, measuring devices, optical components, etc., can solve the problems of not meeting market development, not wide cut-off band, low peak transmittance, etc., and achieve excellent signal-to-noise Ratio, improving test sensitivity and accuracy, and meeting performance requirements

Active Publication Date: 2016-11-16
镇江爱豪科思电子科技有限公司
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Problems solved by technology

[0004] However, currently used to measure SF 6 The 10560nm bandpass infrared filter for gas has a wide passband, a cut-off band that is not wide enough, and a low peak transmittance, so the measurement accuracy, stability and anti-interference ability need to be improved, and the sensitivity is poor, which cannot meet the market development. needs

Method used

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  • Infrared optical fiber for detecting sulfur hexafluoride gas and preparation method thereof
  • Infrared optical fiber for detecting sulfur hexafluoride gas and preparation method thereof

Examples

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Embodiment 1

[0023] Such as figure 1 As shown, a kind of sulfur hexafluoride gas detection infrared filter provided in this embodiment is:

[0024] (1) Single crystal Si with a size of Φ50.8×0.3mm is used as the substrate; the silicon is double-sided polished, the thickness is 300±10 μm, and the crystal orientation is .

[0025] (2) Zinc sulfide ZnS and single-crystal germanium Ge are selected as coating materials, and the main film system surface film A and the interference cut-off film system surface film B are respectively deposited on the two surfaces of the substrate.

[0026] (3) The main film A series surface film adopts: Sub / (HL)6H(LH)L(HL)4H(LH)L(HL)6H(LH)L / Air.

[0027] (4) B-side film of dry film system: Sub / 0.265 (0.5HL0.5H) 6 0.378(0.5HL0.5H) 6 0.53(0.5HL0.5H) 6 0.738(0.5HL0.5H) 6 / Air.

[0028] The meanings of the symbols in the film system are: Sub is the substrate, Air is air, H and L represent one of film layer 2 (Ge) (high refractive index material layer) and fil...

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Abstract

The invention discloses an infrared optical fiber for detecting sulfur hexafluoride gas and a preparation method thereof. Monocrystalline Si is used as the substrate of the infrared optical filter; Ge is used as a high-index material; and ZnS is used as a low-index material. A main film system surface film and an interference cutoff film system surface film are respectively deposited on two surfaces of the substrate. A film plating process is characterized in that electron beam evaporation of Ge is performed, and the deposition rate is 8 angstroms / sec; porous molybdenum boat electrothermal evaporation of ZnS is performed, and the deposition rate is 20 angstroms / sec; and when evaporation is started, the vacuum degree is 1.0*10<3>Pa and the deposition temperature is 130 DEG C. According to the infrared optical filter for detecting the sulfur hexafluoride gas and a 10560nm bandpass infrared optical filter obtained through the preparation method, a peak transmittance can reach above 90%; a signal-to-noise ratio is greatly improved; an interference by other gases can be well inhibited; and detecting precision and detecting efficiency of an instrument are improved.

Description

technical field [0001] The invention relates to an infrared filter production technology, in particular to an infrared filter for detecting sulfur hexafluoride gas and a preparation method thereof. Background technique [0002] The principle of infrared gas concentration detection is to measure the gas concentration according to the gas infrared characteristic absorption peak, so selecting the infrared gas analysis filter with a specific wavelength is a key component of the infrared gas analyzer. The light emitted by the light source passes through the filter to obtain quasi-monochromatic light with a certain bandwidth (the narrower the bandwidth, the better the monochromaticity). concentration of the outgoing gas. SF in some refrigeration, electrical, mining equipment 6 Gas leakage, on the one hand, will cause the decline of the internal insulation performance of the equipment, and bring safety hazards to the safe operation of power equipment; on the other hand, SF 6 As ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28G01N21/35
CPCG01N21/3504G02B5/281G02B5/285
Inventor 刘桂武张旭邵海成侯海港
Owner 镇江爱豪科思电子科技有限公司
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