The invention discloses a 10560 nano bandpass
infrared filter and a making method of the same. The
infrared filter is characterized in that a monocrystalline
germanium Ge with the dimension Phi being 25.4*0.5mm is adopted as a base plate; the surface iris diaphragm N is less than or equal to 5, the partial iris diaphragm
Delta N is less than or equal to 0.5, the parallelism Theta is less than or equal to 1 minute, and the
surface smoothness is better than 60 / 40;
zinc sulfide ZnS and monocrystalline
germanium Ge are adopted for film plating materials, a main film
system surface film Sub / HLHLH2LHLHLHLHLH2LHLHL / Air and an interference stop film
system surface film Sub / 0.76(0.5HL0.5H)5 0.5 (0.5HL0.5H)5 0.35 (0.5HL0.5H)5 0.25 (0.5HL0.5H)6 0.16(0.5HL0.5H)6 / Air are respectively deposited on the two surfaces of the base plate, and the film plating
process conditions are that under the high vacuum (vacuum degree less than or equal to 10-3Pa), heating and baking under 300 DEG C is carried out and the physical
gas phase depositing method is adopted for auxiliary film plating with the
ion resource. The 10560 nano bandpass
infrared filter made through the making method of the same has the
peak value transmission amounting to more than 90%, greatly improves the
signal noise ratio, satisfactorily restrains the interference of other gases, and improves the detecting precision and efficiency of the instrument.