CO2 gas detection infrared filter and preparation method thereof

An infrared filter and gas detection technology, applied in optics, optical components, instruments, etc., can solve the problems of measurement accuracy, stability and anti-interference need to be improved, the cut-off band is not wide enough, and the difficulty of preparation is increased, achieving excellent Signal-to-noise ratio, improving test sensitivity and accuracy, and meeting performance requirements

Active Publication Date: 2016-08-10
JIANGSU UNIV
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Problems solved by technology

However, TiO2 and SiO2 are used for the front film material, and Si and SiO2 are used for the reverse side. Although the reverse film layer is effectively reduced, it also increases the difficulty of preparation and the cut-off band is also narrow. layer, yet to be further optimized
[0007] However, the 4260nm bandpass infrared filter currently used to measure carbon dioxide has a wide passband, a cut-off band that is not wide enough, and a low peak transmittance, so the measurement accuracy, stability and anti-interference ability still need to be improved. Poor sensitivity, unable to meet the needs of market development

Method used

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  • CO2 gas detection infrared filter and preparation method thereof
  • CO2 gas detection infrared filter and preparation method thereof

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Embodiment 1

[0025] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0026] Example 1:

[0027] Such as figure 1 As shown, a kind of CO2 gas detection infrared filter and its preparation method provided by the present embodiment are:

[0028] (1) Single crystal Si with a size of Φ50.8 is used as the substrate; the silicon is double-sided polished, the thickness is 300±10 μm, and the crystal orientation is .

[0029] (2) SiO and single crystal Ge are selected as coating materials, and the main film-based film A and the interference cut-off film-based film B are respectively deposited on the two surfaces of the substrate.

[0030] (3) The film structure of the main film system adopts Air / 1.16L1.232HL 6HLHLHL 4HLHLHL 6HLH / Sub.

[0031] (4) Interference cut-off film system surface film: Sub / 0.42 (HL) 9 0.65(HL) 8 1.53(HL) 6 / Air.

[0032] The meanings of the symbols in the film system are: Sub is the substrate, Air ...

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Abstract

The invention discloses a CO2 gas detection infrared filter and a preparation method thereof. An infrared filter substrate material is single crystal Si. A high refractive index material is Ge. A low refractive index material is SiO. A main film system face membrane and an interference cut-off film system face membrane are respectively deposited on two surfaces of a substrate. According to the coating process conditions, electron beam evaporation is selected for Ge, and the deposition rate is 8 angstroms / sec; porous molybdenum boat electrothermal evaporation is selected for SiO, and the deposition rate is 40 angstroms / sec; the start evaporation vacuum degree is 1.0*10<-3>Pa; and the deposition temperature is 200 DEG C. According to the acquired 4260nm band pass infrared filter, the peak transmittance is up to 90%; the signal to noise ratio is greatly improved; the interference of other gases can be well suppressed; and the detection accuracy and the efficiency of an instrument are improved.

Description

technical field [0001] The invention relates to the technical field of infrared filter preparation, in particular to a CO 2 An infrared filter for gas detection and a preparation method thereof. Background technique [0002] In metallurgy, aerospace, agriculture, medical treatment, environmental protection, etc., CO 2 Quantitative detection and control of the concentration, and in many cases the application environment is very harsh, such as flammable and explosive, high temperature, high pressure, magnetic field and other occasions. Therefore, a CO2 with good stability, good selectivity, high sensitivity, miniaturization and portability has been developed. 2 The gas sensor has high practical value. [0003] Infrared analyzer is an instrument that uses gas infrared characteristic absorption peaks to measure gas content. Selecting infrared gas analysis filters with specific wavelengths is a key component of infrared gas analyzers. The light emitted by the light source pas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28
CPCG02B5/281
Inventor 乔冠军侯海港黄清伟邵海成刘桂武
Owner JIANGSU UNIV
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