Microsphere coated diamond-like film rolling oscillation device

Abstract

The invention discloses a microsphere coated diamond-like film rolling oscillation device and belongs to the technical field of physical vapor deposition coating preparation. The microsphere coated diamond-like film rolling oscillation device is uniform in coating, and can reduce the surface roughness of microspheres. According to the technical scheme, the microsphere coated diamond-like film rolling oscillation device comprises a microsphere disc, a connector, a connecting part, a base and an electromagnetic relay; a support is arranged on the base, and the connector is installed on the support through a supporting rod and can swing around the supporting rod; and one end of the connector is connected with the microsphere disc, an arc-shaped protrusion protruding inwards is arranged on the microsphere disc, the other end of the connector is in drive connection with the electromagnetic relay through the connecting part, and the connecting part or the connector or the disc is further provided with an elastic part enabling the disc to be reset after the disc swings. By adjusting the inclination angle of the microsphere disc and the attraction frequency of the electromagnetic relay, the motion rail of the microspheres is optimized, the microspheres are dispersed, and then a diamond-like film is more uniformly coated with the microspheres.

Description

technical field [0001] The invention belongs to the technical field of physical vapor deposition coating preparation, and in particular relates to a microsphere-coated diamond-like thin film rolling oscillation device which is used to prepare a uniform coating on the surface of microspheres by magnetron sputtering technology and can operate normally at high temperature. Background technique [0002] The patent document whose authorization announcement number is CN200998706Y discloses a particle-coated oscillating device. A fulcrum is set on a swing rod, two ends of the swing rod are respectively connected with an eccentric wheel and a disc, and the motor drives the eccentric wheel to rotate so that the swing rod swings back and forth around the fulcrum, Drive the disc to oscillate to achieve particle coating. The patent document whose authorization announcement number is CN2757933Y discloses a horizontal vibration type microball bouncing device. coated. Although the above-...

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Problems solved by technology

In the above two devices, a stepping motor is installed under the disk, and the temperature of the disk is high during use, even exceeding 100°C, and the stepping motor is easily damaged

The two devices adopt the movement mode of swing and rotation. The trajectory of the microspheres in the disk is roughly elliptical. After the microspheres are aggregated, they cannot be dispersed, the microspheres cannot roll smoothly, and the surface of the microspheres is unevenly coated.

[0004] In addition, in the above four schemes, the inside of the disk is smooth and hemispherical, and the microspheres are not easy to disperse in the disk, and cannot be randomly and smoothly rolled in all directions, resulting in rough surface coating of the microspheres, resulting in poor surface quality of the surface coating of the microspheres. not tall

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