Integrated microelectromechanical switches and related methods
A kind of micro-electromechanical switch, micro-electromechanical technology, applied in this field
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[0020] According to some embodiments of the invention, a system includes a plurality of microelectromechanical switches having a plurality of gates coupled to each other. Each microelectromechanical switch includes beam electrodes disposed on a substrate. The microelectromechanical switch further includes a beam having an anchor portion coupled to the beam electrode, a first beam portion extending from the anchor portion in a first direction, and a second beam portion extending from the anchor portion in a second direction opposite to the first direction. Beam section. The microelectromechanical switch further includes a first control electrode and a first contact electrode disposed on the substrate facing the first beam portion, and a second control electrode and a second contact electrode disposed on the substrate facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurali...
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