A method for repairing and reusing the cylindrical handle on the tantalum ring
A handle and columnar technology, which is applied in the field of repair and reuse of columnar handles on tantalum rings, can solve the problems of increasing semiconductor production costs and achieve the effect of reducing production costs
Active Publication Date: 2018-05-18
KONFOONG MATERIALS INTERNATIONAL CO LTD
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Problems solved by technology
[0003] As a result, a new tantalum ring welded with a cylindrical handle is required, which increases the production cost of the semiconductor
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[0024] An embodiment of the present invention provides a method for repairing and reusing a columnar handle on a tantalum ring, which can realize the repair and reuse of the columnar handle, thereby reducing the production cost of semiconductors.
[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0026] It should be noted that, for ease of description, the present invention abbreviates the ...
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Abstract
The invention provides a repairing and reusing method for a cylindrical handle on a tantalum ring. The method includes the steps that firstly, a knob on the tantalum ring and the portion, welded to the tantalum ring, of the knob are separated from the tantalum ring, a semi-finished knob is obtained, and first preset machining allowance is formed between the bottom diameter of the semi-finished knob and the bottom diameter of a finished knob; secondly, attachments on the surface of the semi-finished knob are removed; thirdly, the bottom of the semi-finished knob is turned into a preset thickness and a preset diameter with second preset machining allowance, and a roughly-machined knob is formed; and fourthly, the surface of the roughly-machined knob is subjected to pickling, residual substances are removed, and the finished knob is obtained. According to the repairing and reusing method, the tantalum ring and the knob are separated by means of machining, the accessory knob is subjected to repairing treatment after being extracted, repairing and reusing of the knob are achieved, and therefore the production cost of a semiconductor is reduced.
Description
technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method for repairing and reusing a cylindrical handle on a tantalum ring. Background technique [0002] Tantalum rings are required in the semiconductor PVD (abbreviation for Physical Vapor Deposition, Physical Vapor Deposition) production process. When the tantalum ring is covered and sputtered off during the coating process and cannot be used, it will be scrapped. The cylindrical handle (abbreviated as knob) is an accessory on the tantalum ring, which is welded to the tantalum ring. At the same time, the surface of the cylindrical handle has a thick coating and cannot be reused. Usually, the cylindrical handle and the tantalum ring are scrapped together. [0003] As a result, a new tantalum ring welded with a columnar handle needs to be used, which increases the production cost of the semiconductor. [0004] To sum up, how to realize the repair and reuse of the colum...
Claims
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IPC IPC(8): B23P6/00
CPCB23P6/00
Inventor 姚力军潘杰相原俊夫大岩一彦王学泽陈雪
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD