Method and device for calibrating vacuum ultraviolet spectral radiometers
A technology of vacuum ultraviolet light and vacuum ultraviolet light source, which is applied in spectrum investigation and other directions, can solve the problems of unable to realize the calibration of vacuum ultraviolet spectroradiometer, unable to meet the performance index requirements of vacuum ultraviolet band, affecting the normal progress of space exploration plan, etc. Save research and development costs, shorten the development cycle, and reduce the effect of repetition
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[0036] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The accompanying drawings constitute a part of the application and are used together with the embodiments of the present invention to explain the principle of the present invention.
[0037] The present invention provides a method and device for calibrating a vacuum ultraviolet spectroradiometer. The method includes: spectral radiance responsivity calibration, spectral radiance responsivity calibration and / or wavelength accuracy calibration, all of which are performed in an oil-free vacuum Carried out in the warehouse. The calibration device includes a spectral radiance responsivity calibration mechanism, a spectral radiance illuminance responsivity calibration mechanism and a wavelength accuracy calibration mechanism.
[0038] The spectral radiance responsivity calibration mechanism mainly includes vacuum ultraviolet light source 1, vacuum ult...
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