Fabrication method of atomic magnetic sensor based on film additive processing

Abstract

The invention relates to a method for preparing an atomic magnetic sensor based on film additional material processing. On the basis of the micro-nano material reducing processing and 3D material additional material processing principles, a micro-nano micro-cavity array is processed on a transparent substrate by combining a light-operated conductive mechanism. Each micro-nano micro-cavity consists of a working medium storage zone and a magnetic force sensing zone to complete internal film processing. At an alkali metal composite material deposition point of a processing site of the working medium storage zone in the micro cavity, gas injection and sealing are carried out to form a sealed micro-nano micro-cavity array; =external photoelectric sensitive film layer processing is carried out to build a light-operated conductive layer; a micro light source and a photoelectric sensor are integrated externally; and time sequence controlling is carried out by using an all-optical atomic force sensing behavior, thereby realizing high-space high-time-resolution magnetic field sensing preparation of optical pumping and light modulation. The method has characteristics of simple preparation process, simple structure, a low-temperature-refrigeration-system-free effect, high sensitivity, large detection information amount, high space resolution, high flexibility, and good miniaturization realization effect.

Description

technical field [0001] The invention relates to a method for preparing a magnetic sensor, in particular to a method for preparing an atomic magnetic sensor based on film layer additive processing. Background technique [0002] Magnetic sensors refer to various sensors used to measure magnetic fields. They can also be called magnetometers and Gauss meters. The physical quantity describing the magnetic field in the International System of Units is the magnetic induction intensity, and the unit is Tesla. In the early days, Gauss units prevailed in the electromagnetic field, so magnetometers are also called Gauss meters. Magnetic induction is a vector, which has the characteristics of magnitude and direction. A magnetometer that only measures the magnitude of magnetic induction is called a scalar magnetometer, while a magnetometer that can measure the magnitude of a magnetic field in a specific direction is called a vector magnetometer. Common magnetic sensors are Fluxgate magn...

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