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Lamp and method for manufacturing the same

A manufacturing method and technology of the sealing part, applied in the sealing between the parts of the tube and shell, the shell/shell of the luminous body, the fixing part/supporting part of the luminous body, etc., to prevent leakage, reduce bubble generation, and enhance sealing performance effect

Inactive Publication Date: 2017-10-31
AP SYST INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this way, electric leakage around the terminal pins becomes a bigger problem in the case of high-vacuum heat treatment equipment.

Method used

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  • Lamp and method for manufacturing the same
  • Lamp and method for manufacturing the same
  • Lamp and method for manufacturing the same

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Embodiment Construction

[0119] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. The same numbers are used in the figures for the same elements.

[0120] A substrate processing apparatus according to an embodiment of the present invention, including a lamp for generating light and emitting light, is an apparatus for rapidly thermally treating a substrate using heat generated when generating light and emitting light, so-called Rapid Thermal Process (RTP) equipment.

[0121] Lamps according to embodiments of the present invention may be either of the halogen lamp type and the UV lamp type. Hereinafter, in the explanatio...

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Abstract

A lamp and a method for manufacturing the same are proposed. The lamp according to the invention includes a light emitting part equipped with a light emitting body; a fixed shell connected to the light emitting part to support the light emitting part; terminal pins inserted and installed in the fixed shell, one ends being electrically connected to the light emitting body, and a plurality of sealing parts forming a surrounding environment surrounding the terminal pins in the fixed shell and formed to have a plurality of stepped parts along the extension direction of the terminal pins, and at least two of the plurality of stepped parts being made of different sealing materials and sealing the surrounding environment of the terminal pins. Therefore, according to the embodiment of the invention, sealing performance or airtight compactness of the circumference of outer circumferential surfaces of the terminal pins is enhanced, and occurrence of electric leakage of the surrounding environment of the terminal pins is prevented. Thus, maintaining and processing a heater block and processing a cavity become easier under high vacuum.

Description

technical field [0001] The invention disclosed herein relates to an apparatus for a lamp and a method for manufacturing the same, and more particularly, to a lamp and a method for manufacturing a lamp for preventing electric leakage. Background technique [0002] In general, a thermal process is an indispensable process in various processes for manufacturing semiconductors, displays, and the like. TiN, TiSi 2 、CoSi 2 Ohmic contact alloying, ion implantation damage annealing, dopant activation, and thin film fabrication are processes that require thermal processes. [0003] As equipment for performing such a thermal process, there are boilers and rapid thermal processing (Rapid Thermal Process; RTP) equipment. RTP devices have not received attention because it is difficult to uniformly maintain the temperature of the entire substrate, maintain the same temperature-time characteristics of other substrates whenever a substrate (wafer) is changed, or accurately measure and co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01K1/36H01K3/12
CPCH01K1/36H01K3/12H01K1/10H01K1/18H01K1/32H01K1/50
Inventor 韩容愚李成龙池尙炫尹柱英尹泳一
Owner AP SYST INC
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