Lamp and method for producing the same
A manufacturing method and technology of the sealing part, applied in the sealing between the parts of the tube and shell, the shell/shell of the luminous body, the fixing part/supporting part of the luminous body, etc., to prevent leakage, reduce bubble generation, and enhance sealing performance effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0119] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. The same numbers are used in the figures for the same elements.
[0120] A substrate processing apparatus according to an embodiment of the present invention, including a lamp for generating light and emitting light, is an apparatus for rapidly thermally treating a substrate using heat generated when generating light and emitting light, so-called Rapid Thermal Process (RTP) equipment.
[0121] Lamps according to embodiments of the present invention may be either of the halogen lamp type and the UV lamp type. Hereinafter, in the explanatio...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com