Focal plane chip, pixel unit and array for collecting and processing laser signals
A technology of pixel unit and laser signal, applied in the field of laser detection, can solve the problems of inaccurate measurement, slow scanning speed, low image spatial resolution, etc., and achieve the effect of improving scanning speed, simple circuit and high image spatial resolution.
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[0047] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0048] see Figure 1 to Figure 4 , the focal plane chip provided by the present invention includes a substrate 202 (material is Si) and a pixel unit array 206 integrated on the substrate 202, a signal processing circuit 212, a timing control circuit and a row selection module; The interconnection metal 205 (the interconnection metal is used as a contact to realize the connection between the device and the Si substrate) is integrated with the metal wiring layer 204 , and the metal wiring layer 204 is connected to the signal processing circuit 212 through the data column line 207 .
[0049] Such as figure 1 with 2 As shown, the metal wiring layer 204 is composed of a plurality of metal wiring units, and each metal wiring unit corresponds to a pixel unit; each metal wiring unit is composed of multiple metal layers and multiple dielectric layers, and on each metal laye...
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