Modular manufacturing multi-purpose winding-type vacuum coating machine

Abstract

The present invention discloses a modular manufacturing multi-purpose roll-to-roll vacuum coating machine, which includes at least two vacuum roll-to-roll coating system units, and the two adjacent vacuum roll-to-roll coating system units are connected through a vacuum coupling valve. The coiled material of the coating is passed through the vacuum connection valve and enters the next empty winding coating system unit; the vacuum winding coating system unit includes an unwinding chamber, a coating chamber, a heat treatment chamber and a winding chamber, all of which are equipped with There are a number of reels that can be used for tensioning, conveying the coil material to be coated, and changing the winding direction of the coil material to be coated. The coating chamber is equipped with a coating hub, and the coil material to be coated is coated on one side in the last vacuum coil coating system unit. Later, because the reel changes its winding direction, the coating on the other side is realized in the next vacuum winding coating system unit.

Description

technical field [0001] The invention relates to the industries of vacuum coating, capacitor film manufacturing and photoelectric display film manufacturing, and realizes single / double-sided coating for flexible film materials, in particular to a modular manufacturing multi-purpose winding vacuum coating machine. Background technique [0002] Vacuum coating is a kind of plasma technology application, that is, in a vacuum environment, the magnetron sputtering cathode with the material to be plated is ignited (the resistance evaporation method is to heat the film material crucible), the magnetron cathode generates plasma, and high-energy ions The particles to be coated are sputtered out by bombarding the target surface (film material), and the sputtered particles are deposited on the workpiece to be plated to form a simple film, a compound film, etc. [0003] Roll-to-roll vacuum coating technology is widely used in the field of functional and decorative film manufacturing of fl...

AI Technical Summary

Problems solved by technology

[0004] The winding mechanisms used in conventional winding vacuum coating equipment are mostly single chamber or multi-chamber. For single chamber equipment, its structural characteristics are: a. It includes a sealed vacuum container (circular or rectangular chamber) ; b. A metal partition is used to isolate an unwinding area, a coating area, and a winding area in the container; c. It has the advantages of compact design, small footprint, and low cost; d. The disadvantage is that each area Poor atmosphere isolation, more dust pollution during work, limited production film system, low production capacity, etc.

For multi-cavity equipment, its disadvantages are the production of single-coated main hub, limited production film system, sing

Images